Diamond-like carbon (DLC) films with thickness of 100 nm were deposited on glass and silicon substrates at temperatures of 20 °C by pulsed laser deposition (PLD) using a polymethyl methacrylate (PMMA) target. The abundant sp3 bonding was made possible because the species ejected from the PMMA target by laser ablation were dissociated into atomic species and atomic hydrogen, thus generating an sp2 etching effect. The sp2 bonding fraction increased due to the additional sp2 etching effect of the atomic hydrogen dissociated from the ambient hydrogen at pressure higher than 10 m Torr.
All Science Journal Classification (ASJC) codes
- Materials Science(all)