Growth of DLC thin films in hydrogen atmosphere by pulsed laser ablation of a PMMA target

T. Yoshitake, T. Nishiyama, K. Nagayama

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) films with thickness of 100 nm were deposited on glass and silicon substrates at temperatures of 20 °C by pulsed laser deposition (PLD) using a polymethyl methacrylate (PMMA) target. The abundant sp3 bonding was made possible because the species ejected from the PMMA target by laser ablation were dissociated into atomic species and atomic hydrogen, thus generating an sp2 etching effect. The sp2 bonding fraction increased due to the additional sp2 etching effect of the atomic hydrogen dissociated from the ambient hydrogen at pressure higher than 10 m Torr.

Original languageEnglish
Pages (from-to)489-490
Number of pages2
JournalJournal of Materials Science Letters
Volume19
Issue number6
DOIs
Publication statusPublished - Jan 1 2000

Fingerprint

Diamond
Carbon films
Polymethyl Methacrylate
Laser ablation
Pulsed lasers
Polymethyl methacrylates
Hydrogen
Diamonds
Thin films
Etching
Diamond like carbon films
Silicon
Pulsed laser deposition
Glass
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

Cite this

Growth of DLC thin films in hydrogen atmosphere by pulsed laser ablation of a PMMA target. / Yoshitake, T.; Nishiyama, T.; Nagayama, K.

In: Journal of Materials Science Letters, Vol. 19, No. 6, 01.01.2000, p. 489-490.

Research output: Contribution to journalArticle

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