Growth of fluorocarbon macromolecules in the gas phase: IV. Li +-attachment mass spectrometric investigation of high-mass neutral radicals in the downstream region of Ar/c-C4F8 plasmas

Hiroshi Okumura, Kenji Furuya, Akira Harata

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Mass analysis has been conducted on neutral species in the downstream region of Ar/c-C4F8 plasmas by Li+-attachment mass spectrometry. Various peaks appeared in the mass spectrum observed in the case of 29% c-C4F8, and many of them have unambiguously been assigned to the Li+ adducts of neutral radicals with odd-numbered fluorine atoms from 2n + 1 to 2n - 5, where n means the number of carbon atoms, as well as neutral species with even-numbered fluorine atoms from 2n + 2 to 2n - 10. In contrast, only the peaks due to CnF 2n+2 (n = 1-7), CnF2n (n = 1, 4-8), C nF2n-2 (n = 3, 5-8) and C9F14 appeared in the case of 2.2% c-C4F8. These findings demonstrate that the Li+-attachment ionization is fragment-free, not only for relatively stable perfluorocarbon species but also for their neutral radicals, and therefore effective for the identification of high-mass neutral perfluorocarbon radicals. The analysis of the growth mechanisms of C nF2n+2 and CnF2n on the basis of thermochemistry has proposed CF3CF as an important reactant.

Original languageEnglish
Article number065205
JournalJournal of Physics D: Applied Physics
Volume42
Issue number6
DOIs
Publication statusPublished - Apr 8 2009

Fingerprint

Fluorocarbons
fluorocarbons
Macromolecules
macromolecules
attachment
Fluorine
Gases
vapor phases
Plasmas
Atoms
fluorine
Thermochemistry
atoms
thermochemistry
mass spectra
adducts
Ionization
Mass spectrometry
mass spectroscopy
Carbon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

Cite this

@article{333e9b00f09c4c3892fe1ae961cf1e1d,
title = "Growth of fluorocarbon macromolecules in the gas phase: IV. Li +-attachment mass spectrometric investigation of high-mass neutral radicals in the downstream region of Ar/c-C4F8 plasmas",
abstract = "Mass analysis has been conducted on neutral species in the downstream region of Ar/c-C4F8 plasmas by Li+-attachment mass spectrometry. Various peaks appeared in the mass spectrum observed in the case of 29{\%} c-C4F8, and many of them have unambiguously been assigned to the Li+ adducts of neutral radicals with odd-numbered fluorine atoms from 2n + 1 to 2n - 5, where n means the number of carbon atoms, as well as neutral species with even-numbered fluorine atoms from 2n + 2 to 2n - 10. In contrast, only the peaks due to CnF 2n+2 (n = 1-7), CnF2n (n = 1, 4-8), C nF2n-2 (n = 3, 5-8) and C9F14 appeared in the case of 2.2{\%} c-C4F8. These findings demonstrate that the Li+-attachment ionization is fragment-free, not only for relatively stable perfluorocarbon species but also for their neutral radicals, and therefore effective for the identification of high-mass neutral perfluorocarbon radicals. The analysis of the growth mechanisms of C nF2n+2 and CnF2n on the basis of thermochemistry has proposed CF3CF as an important reactant.",
author = "Hiroshi Okumura and Kenji Furuya and Akira Harata",
year = "2009",
month = "4",
day = "8",
doi = "10.1088/0022-3727/42/6/065205",
language = "English",
volume = "42",
journal = "Journal Physics D: Applied Physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",
number = "6",

}

TY - JOUR

T1 - Growth of fluorocarbon macromolecules in the gas phase

T2 - IV. Li +-attachment mass spectrometric investigation of high-mass neutral radicals in the downstream region of Ar/c-C4F8 plasmas

AU - Okumura, Hiroshi

AU - Furuya, Kenji

AU - Harata, Akira

PY - 2009/4/8

Y1 - 2009/4/8

N2 - Mass analysis has been conducted on neutral species in the downstream region of Ar/c-C4F8 plasmas by Li+-attachment mass spectrometry. Various peaks appeared in the mass spectrum observed in the case of 29% c-C4F8, and many of them have unambiguously been assigned to the Li+ adducts of neutral radicals with odd-numbered fluorine atoms from 2n + 1 to 2n - 5, where n means the number of carbon atoms, as well as neutral species with even-numbered fluorine atoms from 2n + 2 to 2n - 10. In contrast, only the peaks due to CnF 2n+2 (n = 1-7), CnF2n (n = 1, 4-8), C nF2n-2 (n = 3, 5-8) and C9F14 appeared in the case of 2.2% c-C4F8. These findings demonstrate that the Li+-attachment ionization is fragment-free, not only for relatively stable perfluorocarbon species but also for their neutral radicals, and therefore effective for the identification of high-mass neutral perfluorocarbon radicals. The analysis of the growth mechanisms of C nF2n+2 and CnF2n on the basis of thermochemistry has proposed CF3CF as an important reactant.

AB - Mass analysis has been conducted on neutral species in the downstream region of Ar/c-C4F8 plasmas by Li+-attachment mass spectrometry. Various peaks appeared in the mass spectrum observed in the case of 29% c-C4F8, and many of them have unambiguously been assigned to the Li+ adducts of neutral radicals with odd-numbered fluorine atoms from 2n + 1 to 2n - 5, where n means the number of carbon atoms, as well as neutral species with even-numbered fluorine atoms from 2n + 2 to 2n - 10. In contrast, only the peaks due to CnF 2n+2 (n = 1-7), CnF2n (n = 1, 4-8), C nF2n-2 (n = 3, 5-8) and C9F14 appeared in the case of 2.2% c-C4F8. These findings demonstrate that the Li+-attachment ionization is fragment-free, not only for relatively stable perfluorocarbon species but also for their neutral radicals, and therefore effective for the identification of high-mass neutral perfluorocarbon radicals. The analysis of the growth mechanisms of C nF2n+2 and CnF2n on the basis of thermochemistry has proposed CF3CF as an important reactant.

UR - http://www.scopus.com/inward/record.url?scp=63649095636&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=63649095636&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/42/6/065205

DO - 10.1088/0022-3727/42/6/065205

M3 - Article

AN - SCOPUS:63649095636

VL - 42

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 6

M1 - 065205

ER -