Growth of manganese silicide layers on Si substrates using MnCl 2 source

Hu Junhua, Takanori Kurokawa, Takashi Suemasu, Shogo Takahara, Masaru Itakura, Hirokazu Tatsuoka

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Fingerprint Dive into the research topics of 'Growth of manganese silicide layers on Si substrates using MnCl <sub>2</sub> source'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy