Growth of metastable cubic AlN by reactive pulsed laser deposition

Satoshi Mohri, Tsuyoshi Yoshitake, Takeshi Hara, Kunihito Nagayama

    Research output: Contribution to journalArticle

    15 Citations (Scopus)

    Abstract

    Aluminum nitride (AlN) thin films were prepared on sapphire (0001) in ambient nitrogen by pulsed laser deposition using a sintered AlN target, and the film structure was evaluated by X-ray diffraction and scanning electron microscopy. 110-oriented hexagonal AlN (α-AlN) films were grown at a nitrogen pressure of 10 mTorr. On the other hand, at 40 mTorr the films' central area was partially studded with 111- and 100-oriented cubic AlN (β-AlN) crystallites with obvious facets. This area was located on the normal of the irradiation spot on the target, and it corresponded to the region on the film where the highly energetic and dense species were deposited. A nonequilibrium condition and large supply of nitrogen are both important factors for the growth of metastable β-AlN.

    Original languageEnglish
    Pages (from-to)1796-1799
    Number of pages4
    JournalDiamond and Related Materials
    Volume17
    Issue number7-10
    DOIs
    Publication statusPublished - Jul 1 2008

    Fingerprint

    Aluminum nitride
    aluminum nitrides
    Pulsed laser deposition
    pulsed laser deposition
    Nitrogen
    nitrogen
    nonequilibrium conditions
    Aluminum Oxide
    Crystallites
    Sapphire
    crystallites
    flat surfaces
    Intercellular Signaling Peptides and Proteins
    sapphire
    aluminum nitride
    Irradiation
    X ray diffraction
    Thin films
    Scanning electron microscopy
    scanning electron microscopy

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Chemistry(all)
    • Mechanical Engineering
    • Materials Chemistry
    • Electrical and Electronic Engineering

    Cite this

    Growth of metastable cubic AlN by reactive pulsed laser deposition. / Mohri, Satoshi; Yoshitake, Tsuyoshi; Hara, Takeshi; Nagayama, Kunihito.

    In: Diamond and Related Materials, Vol. 17, No. 7-10, 01.07.2008, p. 1796-1799.

    Research output: Contribution to journalArticle

    Mohri, Satoshi ; Yoshitake, Tsuyoshi ; Hara, Takeshi ; Nagayama, Kunihito. / Growth of metastable cubic AlN by reactive pulsed laser deposition. In: Diamond and Related Materials. 2008 ; Vol. 17, No. 7-10. pp. 1796-1799.
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