Abstract
Randomly and preferentially oriented thin films of yttria stabilized zirconia (YSZ) have been prepared on fused quartz substrates by ultrasonic spray pyrolysis using zirconium octylate and yttrium octylate as metallo-organic precursors at a substrate temperature of 873-1023 K. The as-deposited films composed of fine columnar grains were found to be crystalline and transparent with a cubic fluorite structure. With increasing substrate temperature the growth rate and diameter of the columnar grains increased and the crystal habit showed a preferential orientation at the (111) plane.
| Original language | English |
|---|---|
| Pages (from-to) | 72-76 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 340 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Feb 26 1999 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry