TY - JOUR
T1 - Heat conduction in microstructured materials
AU - Miyazaki, Koji
AU - Arashi, Toyotaka
AU - Makino, Daisuke
AU - Tsukamoto, Hiroshi
N1 - Funding Information:
Manuscript received February 15, 2005; revised February 18, 2006. This work was supported in part by the Japan Society for the Promotion of Science under Grant 16 760 158. This work was recommended for publication by Associate Editor K. Ramakrishna upon evaluation of the reviewers’ comments. K. Miyazaki is with the Department of Biological Functions and Engineering, Kyushu Institute of Technology, Kitakyushu 808-0196, Japan and also with PRESTO, Japan Science and Technology Agency, Kawaguchi City 332-0012, Japan (e-mail: miyazaki@life.kyutech.ac.jp). T. Arashi is with the Nippon Steel Corporation, Tokyo 100–8071, Japan. D. Makino is with the Mitsubishi Electric Corporation, Tokyo 100, Japan. H. Tsukamoto is with the Department of Biological Functions and Engineering, Kyushu Institute of Technology, Kitakyushu 808-0196, Japan. Digital Object Identifier 10.1109/TCAPT.2006.875905
PY - 2006/6
Y1 - 2006/6
N2 - The phonon Boltzmann equation is solved numerically in order to study the phonon thermal conductivity of micro/nanostructured thin films with open holes in a host material. We focused on the size effect of embedded pores and film thickness on the decrease in thermal conductivity of the film. Simulations have revealed that the temperature profiles in the micro/nanostructured materials are very different from those in their bulk counterparts, due to the ballistic nature of the microscale phonon transport. These simulations clearly demonstrate that the conventional Fourier heat conduction equation cannot be applied to study heat conduction in solids at microscale. The effective thermal conductivity of thin films with micro/nanoholes is calculated from the applied temperature difference and the heat flux. In the present paper, the effective thermal conductivity is shown as a function of the size of the micro/nanoholes and the film thickness. For example, when the size of the hole becomes approximately 1/20th the phonon mean free path in a film, the thickness is 1/10th the mean free path of phonons and the effective thermal conductivity decreases to as low as 6% of the bulk value. The distribution of holes also affects the reduction in the effective thermal conductivity. Thin films embedded with staggered-hole arrays have slightly lower effective thermal conductivities than films with aligned-hole arrays. The cross-sectional area in the thermal transport direction is a significant parameter with respect to the reduction of thermal conductivity. The results of the present study may prove useful in the development of artificial micro/nanostructured materials, including thermoelectrics and low-k dielectrics.
AB - The phonon Boltzmann equation is solved numerically in order to study the phonon thermal conductivity of micro/nanostructured thin films with open holes in a host material. We focused on the size effect of embedded pores and film thickness on the decrease in thermal conductivity of the film. Simulations have revealed that the temperature profiles in the micro/nanostructured materials are very different from those in their bulk counterparts, due to the ballistic nature of the microscale phonon transport. These simulations clearly demonstrate that the conventional Fourier heat conduction equation cannot be applied to study heat conduction in solids at microscale. The effective thermal conductivity of thin films with micro/nanoholes is calculated from the applied temperature difference and the heat flux. In the present paper, the effective thermal conductivity is shown as a function of the size of the micro/nanoholes and the film thickness. For example, when the size of the hole becomes approximately 1/20th the phonon mean free path in a film, the thickness is 1/10th the mean free path of phonons and the effective thermal conductivity decreases to as low as 6% of the bulk value. The distribution of holes also affects the reduction in the effective thermal conductivity. Thin films embedded with staggered-hole arrays have slightly lower effective thermal conductivities than films with aligned-hole arrays. The cross-sectional area in the thermal transport direction is a significant parameter with respect to the reduction of thermal conductivity. The results of the present study may prove useful in the development of artificial micro/nanostructured materials, including thermoelectrics and low-k dielectrics.
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U2 - 10.1109/TCAPT.2006.875905
DO - 10.1109/TCAPT.2006.875905
M3 - Article
AN - SCOPUS:33744795203
VL - 29
SP - 247
EP - 253
JO - IEEE Transactions on Components and Packaging Technologies
JF - IEEE Transactions on Components and Packaging Technologies
SN - 1521-3331
IS - 2
ER -