Heterogeneously integrated laser-induced fluorescence detection devices: Integration of an excitation source

Toshihiro Kamei, Keiko Sumitomo, Sachiko Ito, Ryo Takigawa, Noriyuki Tsujimura, Hisayuki Kato, Takeshi Kobayashi, Ryutaro Maeda

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


We have proposed and developed a fluorescence detector in which a thick SiO2/Ta 2O5 multilayer optical interference filter is monolithically integrated on a hydrogenated amorphous silicon (a-Si:H) PIN photodiode. Combined with the optical transparency of the detector's glass substrate, the annular shape of the detector will enable us to construct a module containing a detector and an excitation source. Based on a detection platform that comprises a fluorescence-collecting microlens and an annular fluorescence detector while using an external laser source, we have demonstrated single molecule DNA detection capability when combined with a polymerase chain reaction (PCR). We also describe our work towards the integration of an excitation source to fabricate a heterogeneously-integrated laser-induced fluorescence detection (LIF) device comprising a laser diode, micro-lenses and the integrated a-Si:H fluorescence detector.

Original languageEnglish
Article number06JL02
JournalJapanese Journal of Applied Physics
Issue number6 SPEC. ISSUE
Publication statusPublished - Jun 2014
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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