This paper addresses the problem of how to extract, describe, and evaluate handwriting deformation from the deterministic viewpoint for improving recognition accuracy. The key ideas are threefold. The first is to extract handwriting deformation vector field (DVF) between a pair of input and target images by 2D warping. The second is to hierarchically decompose the DVF by a parametric deformation model of global/local affine transformation, where local affine transformation is iteratively applied to the DVF by decreasing window sizes. The third is to accept only low-order deformation components as natural, within-class handwriting deformation. Experiments using the handwritten numeral database IPTP CDROM1B show that correlation-based matching absorbing components of global affine transformation and local affine transformation up to the 3rd order achieved a higher recognition rate of 92.1% than that of 87.0% obtained by original 2D warping.