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High-concentration, low-temperature, and low-cost excimer laser doping for 4h-sic power device fabrication
Kaname Imokawa, Toshifumi Kikuchi, Kento Okamoto, Daisuke Nakamura, Akihiro Ikeda, Tanemasa Asano, Hiroshi Ikenoue
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution