High frequency electrical circuits on a planar lightwave circuit platform

S. Mino, T. Ohyama, T. Hashimoto, Y. Akahori, K. Yoshino, Y. Yamada, Kazutoshi Kato, M. Yasu, K. Moriwaki

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

We investigated the propagation losses and the characteristic impedances ZL of coplanar waveguides (CPW's) and microstrip lines (MSL's) on a planar lightwave circuit (PLC)-platform formed on a silica /silicon substrate. The loss of the CPW's was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 μm thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan δ). On the other hand, the loss of the MSL's, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 μm thick polyimide. These lower loss MSL's on a PLC-platform can be applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPW's the ground planes are not divided by signal lines or DC bias lines. The structure of CPW's and MSL's on a PLC-platform with ZL of 50 Ω was also studied in detail.

Original languageEnglish
Pages (from-to)806-810
Number of pages5
JournalJournal of Lightwave Technology
Volume14
Issue number5
DOIs
Publication statusPublished - May 1996
Externally publishedYes

Fingerprint

Coplanar waveguides
platforms
Microstrip lines
Networks (circuits)
waveguides
Telephone lines
modules
Silicon
silicon
Substrates
Silica
silicon dioxide
Antenna grounds
tangents
polyimides
Polyimides
direct current
impedance
propagation

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Mino, S., Ohyama, T., Hashimoto, T., Akahori, Y., Yoshino, K., Yamada, Y., ... Moriwaki, K. (1996). High frequency electrical circuits on a planar lightwave circuit platform. Journal of Lightwave Technology, 14(5), 806-810. https://doi.org/10.1109/50.495161

High frequency electrical circuits on a planar lightwave circuit platform. / Mino, S.; Ohyama, T.; Hashimoto, T.; Akahori, Y.; Yoshino, K.; Yamada, Y.; Kato, Kazutoshi; Yasu, M.; Moriwaki, K.

In: Journal of Lightwave Technology, Vol. 14, No. 5, 05.1996, p. 806-810.

Research output: Contribution to journalArticle

Mino, S, Ohyama, T, Hashimoto, T, Akahori, Y, Yoshino, K, Yamada, Y, Kato, K, Yasu, M & Moriwaki, K 1996, 'High frequency electrical circuits on a planar lightwave circuit platform', Journal of Lightwave Technology, vol. 14, no. 5, pp. 806-810. https://doi.org/10.1109/50.495161
Mino S, Ohyama T, Hashimoto T, Akahori Y, Yoshino K, Yamada Y et al. High frequency electrical circuits on a planar lightwave circuit platform. Journal of Lightwave Technology. 1996 May;14(5):806-810. https://doi.org/10.1109/50.495161
Mino, S. ; Ohyama, T. ; Hashimoto, T. ; Akahori, Y. ; Yoshino, K. ; Yamada, Y. ; Kato, Kazutoshi ; Yasu, M. ; Moriwaki, K. / High frequency electrical circuits on a planar lightwave circuit platform. In: Journal of Lightwave Technology. 1996 ; Vol. 14, No. 5. pp. 806-810.
@article{5bb131f4b1664b93ac52a3f8633bde0e,
title = "High frequency electrical circuits on a planar lightwave circuit platform",
abstract = "We investigated the propagation losses and the characteristic impedances ZL of coplanar waveguides (CPW's) and microstrip lines (MSL's) on a planar lightwave circuit (PLC)-platform formed on a silica /silicon substrate. The loss of the CPW's was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 μm thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan δ). On the other hand, the loss of the MSL's, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 μm thick polyimide. These lower loss MSL's on a PLC-platform can be applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPW's the ground planes are not divided by signal lines or DC bias lines. The structure of CPW's and MSL's on a PLC-platform with ZL of 50 Ω was also studied in detail.",
author = "S. Mino and T. Ohyama and T. Hashimoto and Y. Akahori and K. Yoshino and Y. Yamada and Kazutoshi Kato and M. Yasu and K. Moriwaki",
year = "1996",
month = "5",
doi = "10.1109/50.495161",
language = "English",
volume = "14",
pages = "806--810",
journal = "Journal of Lightwave Technology",
issn = "0733-8724",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "5",

}

TY - JOUR

T1 - High frequency electrical circuits on a planar lightwave circuit platform

AU - Mino, S.

AU - Ohyama, T.

AU - Hashimoto, T.

AU - Akahori, Y.

AU - Yoshino, K.

AU - Yamada, Y.

AU - Kato, Kazutoshi

AU - Yasu, M.

AU - Moriwaki, K.

PY - 1996/5

Y1 - 1996/5

N2 - We investigated the propagation losses and the characteristic impedances ZL of coplanar waveguides (CPW's) and microstrip lines (MSL's) on a planar lightwave circuit (PLC)-platform formed on a silica /silicon substrate. The loss of the CPW's was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 μm thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan δ). On the other hand, the loss of the MSL's, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 μm thick polyimide. These lower loss MSL's on a PLC-platform can be applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPW's the ground planes are not divided by signal lines or DC bias lines. The structure of CPW's and MSL's on a PLC-platform with ZL of 50 Ω was also studied in detail.

AB - We investigated the propagation losses and the characteristic impedances ZL of coplanar waveguides (CPW's) and microstrip lines (MSL's) on a planar lightwave circuit (PLC)-platform formed on a silica /silicon substrate. The loss of the CPW's was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 μm thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan δ). On the other hand, the loss of the MSL's, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 μm thick polyimide. These lower loss MSL's on a PLC-platform can be applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPW's the ground planes are not divided by signal lines or DC bias lines. The structure of CPW's and MSL's on a PLC-platform with ZL of 50 Ω was also studied in detail.

UR - http://www.scopus.com/inward/record.url?scp=0030146084&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030146084&partnerID=8YFLogxK

U2 - 10.1109/50.495161

DO - 10.1109/50.495161

M3 - Article

AN - SCOPUS:0030146084

VL - 14

SP - 806

EP - 810

JO - Journal of Lightwave Technology

JF - Journal of Lightwave Technology

SN - 0733-8724

IS - 5

ER -