High functionality of an optical fiber stylus for micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Kosuke Uchiyama, Takahiko Yamamoto, Ryosuke Nagata, Kunitaka Fujiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.

Original languageEnglish
Title of host publicationLaser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019
EditorsLiam Blunt, Wolfgang Knapp
Publishereuspen
Pages73-77
Number of pages5
ISBN (Electronic)9780995775138
Publication statusPublished - Jan 1 2019
Event13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 - Sheffield, United Kingdom
Duration: Mar 13 2019Mar 14 2019

Publication series

NameLaser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019

Conference

Conference13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019
CountryUnited Kingdom
CitySheffield
Period3/13/193/14/19

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Murakami, H., Katsuki, A., Sajima, T., Uchiyama, K., Yamamoto, T., Nagata, R., & Fujiyoshi, K. (2019). High functionality of an optical fiber stylus for micro metrology. In L. Blunt, & W. Knapp (Eds.), Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 (pp. 73-77). (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019). euspen.