High functionality of an optical fiber stylus for micro metrology

Hiroshi Murakami; Akio Katsuki; Takao Sajima; Kosuke Uchiyama; Takahiko Yamamoto; Ryosuke Nagata; Kunitaka Fujiyoshi

High functionality of an optical fiber stylus for micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Kosuke Uchiyama, Takahiko Yamamoto, Ryosuke Nagata, Kunitaka Fujiyoshi

Manufacturing Process

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.

Original language	English
Title of host publication	Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019
Editors	Liam Blunt, Wolfgang Knapp
Publisher	euspen
Pages	73-77
Number of pages	5
ISBN (Electronic)	9780995775138
Publication status	Published - Jan 1 2019
Event	13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 - Sheffield, United Kingdom Duration: Mar 13 2019 → Mar 14 2019

Publication series

Name	Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019

Conference

Conference	13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019
Country/Territory	United Kingdom
City	Sheffield
Period	3/13/19 → 3/14/19

All Science Journal Classification (ASJC) codes

Engineering(all)
Atomic and Molecular Physics, and Optics

Cite this

Murakami, H., Katsuki, A., Sajima, T., Uchiyama, K., Yamamoto, T., Nagata, R., & Fujiyoshi, K. (2019). High functionality of an optical fiber stylus for micro metrology. In L. Blunt, & W. Knapp (Eds.), Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 (pp. 73-77). (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019). euspen.

High functionality of an optical fiber stylus for micro metrology. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao et al.
Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. ed. / Liam Blunt; Wolfgang Knapp. euspen, 2019. p. 73-77 (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Murakami, H, Katsuki, A, Sajima, T, Uchiyama, K, Yamamoto, T, Nagata, R & Fujiyoshi, K 2019, High functionality of an optical fiber stylus for micro metrology. in L Blunt & W Knapp (eds), Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019, euspen, pp. 73-77, 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019, Sheffield, United Kingdom, 3/13/19.

Murakami H, Katsuki A, Sajima T, Uchiyama K, Yamamoto T, Nagata R et al. High functionality of an optical fiber stylus for micro metrology. In Blunt L, Knapp W, editors, Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. euspen. 2019. p. 73-77. (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019).

Murakami, Hiroshi ; Katsuki, Akio ; Sajima, Takao et al. / High functionality of an optical fiber stylus for micro metrology. Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. editor / Liam Blunt ; Wolfgang Knapp. euspen, 2019. pp. 73-77 (Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019).

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abstract = "We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.",

author = "Hiroshi Murakami and Akio Katsuki and Takao Sajima and Kosuke Uchiyama and Takahiko Yamamoto and Ryosuke Nagata and Kunitaka Fujiyoshi",

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AU - Murakami, Hiroshi

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AU - Sajima, Takao

AU - Uchiyama, Kosuke

AU - Yamamoto, Takahiko

AU - Nagata, Ryosuke

AU - Fujiyoshi, Kunitaka

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N2 - We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.

AB - We aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent and antistatic coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests. As a result, when a stylus tip with a water repellent coating was used, the separation distance from the target surface was shorter by approximately 78% compared with the uncoated tip. Also, when a stylus tip with an antistatic coating was used, the adsorption and separation distances were reduced by 84% and 77% compared with the uncoated tip.

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High functionality of an optical fiber stylus for micro metrology

Abstract

Publication series

Conference

All Science Journal Classification (ASJC) codes

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