Abstract
Sensing layer mixed perovskite oxide, La0.1Sr0.9Co0.4Fe0.6O3-δ (LSCF), and Pd-loaded SnO2 nanoparticles (LSCF@Pd-SnO2) was deposited on the membrane of MEMS device by injection method, and its gas sensing properties to reducing gases and VOCs were investigated by heating sensor in pulse mode with heaters in ON and OFF state for one second repeatedly. The MEMS sensor showed fast response, high sensitivity and stability to 200 ppm C7H8 at 250°C by pulse heating with extremely low power consumption.
Original language | English |
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Title of host publication | Chemical Sensors 12 |
Subtitle of host publication | Chemical and Biological Sensors and Analytical Systems |
Publisher | Electrochemical Society Inc. |
Pages | 31-37 |
Number of pages | 7 |
Volume | 75 |
Edition | 16 |
ISBN (Electronic) | 9781607685395 |
DOIs | |
Publication status | Published - 2016 |
Event | Symposium on Chemical Sensors 12: Chemical and Biological Sensors and Analytical Systems - PRiME 2016/230th ECS Meeting - Honolulu, United States Duration: Oct 2 2016 → Oct 7 2016 |
Other
Other | Symposium on Chemical Sensors 12: Chemical and Biological Sensors and Analytical Systems - PRiME 2016/230th ECS Meeting |
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Country | United States |
City | Honolulu |
Period | 10/2/16 → 10/7/16 |
All Science Journal Classification (ASJC) codes
- Engineering(all)