High-quality formation of multiply stacked SiGe-on-insulator structures by temperature-modulated successive rapid-melting-growth

Yuki Tojo, Ryo Matsumura, Hiroyuki Yokoyama, Masashi Kurosawa, Kaoru Toko, Taizoh Sadoh, Masanobu Miyao

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Fingerprint Dive into the research topics of 'High-quality formation of multiply stacked SiGe-on-insulator structures by temperature-modulated successive rapid-melting-growth'. Together they form a unique fingerprint.

Physics & Astronomy