High quality GaN film growth on AlN buffer layer, pretreated with alternating pulsative supply of TMG and NH3

Jin Soo Hwang, Satoru Tanaka, Sohachi Iwai, Yoshinobu Aoyagi, Seeyearl Seong

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'High quality GaN film growth on AlN buffer layer, pretreated with alternating pulsative supply of TMG and NH3'. Together they form a unique fingerprint.

Engineering

Chemistry

Material Science

Physics

Agricultural and Biological Sciences