High spatial resolution imaging of helium isotope by TOF-SNMS

Ken ichi Bajo, Satoru Itose, Miyuki Matsuya, Morio Ishihara, Kiichiro Uchino, Masato Kudo, Isao Sakaguchi, Hisayoshi Yurimoto

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Laser ionization mass nanoscope is a time-of-flight sputtered neutral mass spectrometer associated with laser post-ionization by tunneling effect. A spherical and chromatic aberration corrector is installed in the primary ion column. The lateral spatial resolving power of He imaging of solid surface has been evaluated by scanning image using a probe diameter of 90 nm from crater edge slope of a He ion-implanted Si substrate. Helium distribution from the scanning image is quantitatively equivalent with depth profiling analysis from surface of the same substrate, indicating that spatial resolving power of 20 nm for depth resolution has been achieved on the He scanning image through use of oblique incident effect of the primary beam.

Original languageEnglish
Pages (from-to)1190-1193
Number of pages4
JournalSurface and Interface Analysis
Volume48
Issue number11
DOIs
Publication statusPublished - Nov 1 2016

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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