High-speed via hole filling using electrophoresis of Ag nanoparticles

Ryo Takigawa, Kohei Nitta, Akihiro Ikeda, Mitsuaki Kumazawa, Toshiharu Hirai, Michio Komatsu, Tanemasa Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As an alternative to conventional electroplating, we propose TSV filling using the electrophoresis of metal nanoparticles. Colloidal solution of Ag nanoparticles having a high zeta potential has been designed and made up. Via holes for the test experiment were prepared in a photoresist layer on a Au film which acts as anode. Ag nanoparticles were completely filled into the cavities of depth of 30 μm and diameter of 10 μm within one minute. After annealing at 250 °C, the electric conductivity was 1.57 × 10-5 [ω·cm]. These results demonstrate the potentials of the application of electrophoresis of metal nanoparticles to high speed TSV filling.

Original languageEnglish
Title of host publication2015 International 3D Systems Integration Conference, 3DIC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesTS5.4.1-TS5.4.4
ISBN (Electronic)9781467393850
DOIs
Publication statusPublished - Nov 20 2015
EventInternational 3D Systems Integration Conference, 3DIC 2015 - Sendai, Japan
Duration: Aug 31 2015Sep 2 2015

Publication series

Name2015 International 3D Systems Integration Conference, 3DIC 2015

Other

OtherInternational 3D Systems Integration Conference, 3DIC 2015
CountryJapan
CitySendai
Period8/31/159/2/15

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Takigawa, R., Nitta, K., Ikeda, A., Kumazawa, M., Hirai, T., Komatsu, M., & Asano, T. (2015). High-speed via hole filling using electrophoresis of Ag nanoparticles. In 2015 International 3D Systems Integration Conference, 3DIC 2015 (pp. TS5.4.1-TS5.4.4). [7334570] (2015 International 3D Systems Integration Conference, 3DIC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/3DIC.2015.7334570