High-temperature thermoelectric measurement of B-Doped SiGe and Si thin films

Woosuck Shin, Masahiko Ishikawa, Maiko Nishibori, Noriya Izu, Toshio Itoh, Ichiro Matsubara

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Recent progress of thin-film type thermoelectric, TE, materials accelerates new microdevices working at room temperature to high temperature, and also requires the measurement techniques for the films. Modified four point pressure contact electrodes have been developed in this study, applied for the high temperature measurement of the resistivity and Seebeck coefficient of the boron-doped Si0.8Ge0.2 and Si thin films. The films were prepared by chemical vapor deposition method and then annealed at high temperature of 1050°C, and their Seebeck coefficients were investigated with two different measurement systems, block heating or air cooling electrodes, from 80 to 780°C. For this temperature range, the Seebeck coefficients of the boron-doped Si0.8Ge0.2 film and boron-doped Si film were 150̃350μV/K and 100̃ 250μV/K, respectively. The deviation of Seebeck coefficient was investigated with various measurement parameter, and the optimized temperature difference for the reliable measurement was found to be 2.2°C.

Original languageEnglish
Pages (from-to)1596-1602
Number of pages7
JournalMaterials Transactions
Volume50
Issue number7
DOIs
Publication statusPublished - Jul 1 2009

Fingerprint

Seebeck effect
Seebeck coefficient
Boron
Thin films
boron
thin films
air cooling
Temperature
thermoelectric materials
electrodes
Electrodes
temperature measurement
temperature gradients
Temperature measurement
vapor deposition
Chemical vapor deposition
deviation
cooling
electrical resistivity
heating

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

High-temperature thermoelectric measurement of B-Doped SiGe and Si thin films. / Shin, Woosuck; Ishikawa, Masahiko; Nishibori, Maiko; Izu, Noriya; Itoh, Toshio; Matsubara, Ichiro.

In: Materials Transactions, Vol. 50, No. 7, 01.07.2009, p. 1596-1602.

Research output: Contribution to journalArticle

Shin, Woosuck ; Ishikawa, Masahiko ; Nishibori, Maiko ; Izu, Noriya ; Itoh, Toshio ; Matsubara, Ichiro. / High-temperature thermoelectric measurement of B-Doped SiGe and Si thin films. In: Materials Transactions. 2009 ; Vol. 50, No. 7. pp. 1596-1602.
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