Abstract
We have developed a highly accurate differential deposition system for the fabrication of X-ray optical devices. Using this system, thin films having a thickness distribution gradually changing along the longitudinal direction on a substrate surface could be produced with sub-nanometer accuracy. The surface flatness of the deposited films was confirmed by atomic force microscopy observation, and the surface was sufficiently smooth to prevent X-ray scattering on the mirror surface. A demonstration of differential deposition was performed and a Pt thin film having the desired thickness profile was successfully deposited on a 100 mm long substrate.
Original language | English |
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Pages (from-to) | 1019-1022 |
Number of pages | 4 |
Journal | Surface and Interface Analysis |
Volume | 40 |
Issue number | 6-7 |
DOIs | |
Publication status | Published - Jun 1 2008 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Physical and Theoretical Chemistry
- Colloid and Surface Chemistry