Hybrid effect study of PAD-conditioning/slurry-supply by high-pressure-micro-jet (HPMJ) method during CMP process

Chengwu Wang, Toshiro Doi, Keiji Miyachi, Keiichi Tsukamoto, Tadakazu Miyashita, Syuhei Kurokawa, Li Fan, Yu Zhang, Wei Hang

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Chemical Compounds

Engineering & Materials Science