Abstract
We have developed a microlaser encoder that can detect displacements relative to an external grating scale with a resolution on the order of 10 nm. Its size is only a few tens of a percent of a conventional encoder's. A long-lasting InP laser diode with a wavelength of 1550 nm was bonded, along with several photodiode chips, within an alignment accuracy of 1μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide lightwaveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus, this microencoder satisfies the market requirements for practical use.
| Original language | English |
|---|---|
| Pages (from-to) | 815-820 |
| Number of pages | 6 |
| Journal | Journal of Lightwave Technology |
| Volume | 21 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Mar 1 2003 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
Cite this
Hybrid microlaser encoder. / Sawada, Renshi; Higurashi, Eiji; Jin, Yoshito.
In: Journal of Lightwave Technology, Vol. 21, No. 3, 01.03.2003, p. 815-820.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Hybrid microlaser encoder
AU - Sawada, Renshi
AU - Higurashi, Eiji
AU - Jin, Yoshito
PY - 2003/3/1
Y1 - 2003/3/1
N2 - We have developed a microlaser encoder that can detect displacements relative to an external grating scale with a resolution on the order of 10 nm. Its size is only a few tens of a percent of a conventional encoder's. A long-lasting InP laser diode with a wavelength of 1550 nm was bonded, along with several photodiode chips, within an alignment accuracy of 1μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide lightwaveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus, this microencoder satisfies the market requirements for practical use.
AB - We have developed a microlaser encoder that can detect displacements relative to an external grating scale with a resolution on the order of 10 nm. Its size is only a few tens of a percent of a conventional encoder's. A long-lasting InP laser diode with a wavelength of 1550 nm was bonded, along with several photodiode chips, within an alignment accuracy of 1μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide lightwaveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus, this microencoder satisfies the market requirements for practical use.
UR - http://www.scopus.com/inward/record.url?scp=0037955490&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0037955490&partnerID=8YFLogxK
U2 - 10.1109/JLT.2003.809542
DO - 10.1109/JLT.2003.809542
M3 - Article
AN - SCOPUS:0037955490
VL - 21
SP - 815
EP - 820
JO - Journal of Lightwave Technology
JF - Journal of Lightwave Technology
SN - 0733-8724
IS - 3
ER -