Hybrid microlaser encoder

Renshi Sawada, Eiji Higurashi, Yoshito Jin

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

We have developed a microlaser encoder that can detect displacements relative to an external grating scale with a resolution on the order of 10 nm. Its size is only a few tens of a percent of a conventional encoder's. A long-lasting InP laser diode with a wavelength of 1550 nm was bonded, along with several photodiode chips, within an alignment accuracy of 1μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide lightwaveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus, this microencoder satisfies the market requirements for practical use.

Original languageEnglish
Pages (from-to)815-820
Number of pages6
JournalJournal of Lightwave Technology
Volume21
Issue number3
DOIs
Publication statusPublished - Mar 1 2003

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coders
chips
gratings
polyimides
photodiodes
semiconductor lasers
alignment
requirements
sensors
silicon
wavelengths

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Sawada, R., Higurashi, E., & Jin, Y. (2003). Hybrid microlaser encoder. Journal of Lightwave Technology, 21(3), 815-820. https://doi.org/10.1109/JLT.2003.809542

Hybrid microlaser encoder. / Sawada, Renshi; Higurashi, Eiji; Jin, Yoshito.

In: Journal of Lightwave Technology, Vol. 21, No. 3, 01.03.2003, p. 815-820.

Research output: Contribution to journalArticle

Sawada, R, Higurashi, E & Jin, Y 2003, 'Hybrid microlaser encoder', Journal of Lightwave Technology, vol. 21, no. 3, pp. 815-820. https://doi.org/10.1109/JLT.2003.809542
Sawada, Renshi ; Higurashi, Eiji ; Jin, Yoshito. / Hybrid microlaser encoder. In: Journal of Lightwave Technology. 2003 ; Vol. 21, No. 3. pp. 815-820.
@article{e1d403b5cf2d4faa95be78ea1aaf9c10,
title = "Hybrid microlaser encoder",
abstract = "We have developed a microlaser encoder that can detect displacements relative to an external grating scale with a resolution on the order of 10 nm. Its size is only a few tens of a percent of a conventional encoder's. A long-lasting InP laser diode with a wavelength of 1550 nm was bonded, along with several photodiode chips, within an alignment accuracy of 1μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide lightwaveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus, this microencoder satisfies the market requirements for practical use.",
author = "Renshi Sawada and Eiji Higurashi and Yoshito Jin",
year = "2003",
month = "3",
day = "1",
doi = "10.1109/JLT.2003.809542",
language = "English",
volume = "21",
pages = "815--820",
journal = "Journal of Lightwave Technology",
issn = "0733-8724",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "3",

}

TY - JOUR

T1 - Hybrid microlaser encoder

AU - Sawada, Renshi

AU - Higurashi, Eiji

AU - Jin, Yoshito

PY - 2003/3/1

Y1 - 2003/3/1

N2 - We have developed a microlaser encoder that can detect displacements relative to an external grating scale with a resolution on the order of 10 nm. Its size is only a few tens of a percent of a conventional encoder's. A long-lasting InP laser diode with a wavelength of 1550 nm was bonded, along with several photodiode chips, within an alignment accuracy of 1μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide lightwaveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus, this microencoder satisfies the market requirements for practical use.

AB - We have developed a microlaser encoder that can detect displacements relative to an external grating scale with a resolution on the order of 10 nm. Its size is only a few tens of a percent of a conventional encoder's. A long-lasting InP laser diode with a wavelength of 1550 nm was bonded, along with several photodiode chips, within an alignment accuracy of 1μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide lightwaveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus, this microencoder satisfies the market requirements for practical use.

UR - http://www.scopus.com/inward/record.url?scp=0037955490&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037955490&partnerID=8YFLogxK

U2 - 10.1109/JLT.2003.809542

DO - 10.1109/JLT.2003.809542

M3 - Article

AN - SCOPUS:0037955490

VL - 21

SP - 815

EP - 820

JO - Journal of Lightwave Technology

JF - Journal of Lightwave Technology

SN - 0733-8724

IS - 3

ER -