Hybrid thin silicon nitride and electro-optic polymer waveguide modulators

Masaaki Ishino, Shiyoshi Yokoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.

Original languageEnglish
Title of host publicationMOC 2015 - Technical Digest of 20th Microoptics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9784863485433
DOIs
Publication statusPublished - Feb 23 2016
Event20th Microoptics Conference, MOC 2015 - Fukuoka, Japan
Duration: Oct 25 2015Oct 28 2015

Publication series

NameMOC 2015 - Technical Digest of 20th Microoptics Conference

Other

Other20th Microoptics Conference, MOC 2015
CountryJapan
CityFukuoka
Period10/25/1510/28/15

Fingerprint

Electrooptical effects
Silicon nitride
silicon nitrides
Modulators
electro-optics
modulators
Polymers
Waveguides
waveguides
low voltage
Optical interconnects
Light modulators
polymers
Electric potential
optical interconnects
Electrodes
chips
high speed
electrodes
silicon nitride

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Ishino, M., & Yokoyama, S. (2016). Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. In MOC 2015 - Technical Digest of 20th Microoptics Conference [7416476] (MOC 2015 - Technical Digest of 20th Microoptics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MOC.2015.7416476

Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. / Ishino, Masaaki; Yokoyama, Shiyoshi.

MOC 2015 - Technical Digest of 20th Microoptics Conference. Institute of Electrical and Electronics Engineers Inc., 2016. 7416476 (MOC 2015 - Technical Digest of 20th Microoptics Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ishino, M & Yokoyama, S 2016, Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. in MOC 2015 - Technical Digest of 20th Microoptics Conference., 7416476, MOC 2015 - Technical Digest of 20th Microoptics Conference, Institute of Electrical and Electronics Engineers Inc., 20th Microoptics Conference, MOC 2015, Fukuoka, Japan, 10/25/15. https://doi.org/10.1109/MOC.2015.7416476
Ishino M, Yokoyama S. Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. In MOC 2015 - Technical Digest of 20th Microoptics Conference. Institute of Electrical and Electronics Engineers Inc. 2016. 7416476. (MOC 2015 - Technical Digest of 20th Microoptics Conference). https://doi.org/10.1109/MOC.2015.7416476
Ishino, Masaaki ; Yokoyama, Shiyoshi. / Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. MOC 2015 - Technical Digest of 20th Microoptics Conference. Institute of Electrical and Electronics Engineers Inc., 2016. (MOC 2015 - Technical Digest of 20th Microoptics Conference).
@inproceedings{038508d7d5574cabac5a8a90d5e39330,
title = "Hybrid thin silicon nitride and electro-optic polymer waveguide modulators",
abstract = "Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.",
author = "Masaaki Ishino and Shiyoshi Yokoyama",
year = "2016",
month = "2",
day = "23",
doi = "10.1109/MOC.2015.7416476",
language = "English",
series = "MOC 2015 - Technical Digest of 20th Microoptics Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "MOC 2015 - Technical Digest of 20th Microoptics Conference",
address = "United States",

}

TY - GEN

T1 - Hybrid thin silicon nitride and electro-optic polymer waveguide modulators

AU - Ishino, Masaaki

AU - Yokoyama, Shiyoshi

PY - 2016/2/23

Y1 - 2016/2/23

N2 - Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.

AB - Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.

UR - http://www.scopus.com/inward/record.url?scp=84969524598&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84969524598&partnerID=8YFLogxK

U2 - 10.1109/MOC.2015.7416476

DO - 10.1109/MOC.2015.7416476

M3 - Conference contribution

AN - SCOPUS:84969524598

T3 - MOC 2015 - Technical Digest of 20th Microoptics Conference

BT - MOC 2015 - Technical Digest of 20th Microoptics Conference

PB - Institute of Electrical and Electronics Engineers Inc.

ER -