Hybrid thin silicon nitride and electro-optic polymer waveguide modulators

Masaaki Ishino, Shiyoshi Yokoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.

Original languageEnglish
Title of host publicationMOC 2015 - Technical Digest of 20th Microoptics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9784863485433
DOIs
Publication statusPublished - Feb 23 2016
Event20th Microoptics Conference, MOC 2015 - Fukuoka, Japan
Duration: Oct 25 2015Oct 28 2015

Publication series

NameMOC 2015 - Technical Digest of 20th Microoptics Conference

Other

Other20th Microoptics Conference, MOC 2015
CountryJapan
CityFukuoka
Period10/25/1510/28/15

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Ishino, M., & Yokoyama, S. (2016). Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. In MOC 2015 - Technical Digest of 20th Microoptics Conference [7416476] (MOC 2015 - Technical Digest of 20th Microoptics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MOC.2015.7416476