Hybrid ultra thin silicon and electro-optic polymer waveguide modulator

Yukinori Inoue, Hiroki Miura, Shiyoshi Yokoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.

Original languageEnglish
Title of host publication22nd Microoptics Conference, MOC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages2
ISBN (Electronic)9784863486096
Publication statusPublished - Nov 19 2017
Event22nd Microoptics Conference, MOC 2017 - Tokyo, Japan
Duration: Nov 19 2017Nov 22 2017

Publication series

Name22nd Microoptics Conference, MOC 2017


Other22nd Microoptics Conference, MOC 2017

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

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