Hybrid ultra thin silicon and electro-optic polymer waveguide modulator

Yukinori Inoue, Hiroki Miura, Shiyoshi Yokoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.

Original languageEnglish
Title of host publication22nd Microoptics Conference, MOC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages302-303
Number of pages2
ISBN (Electronic)9784863486096
DOIs
Publication statusPublished - Nov 19 2017
Event22nd Microoptics Conference, MOC 2017 - Tokyo, Japan
Duration: Nov 19 2017Nov 22 2017

Publication series

Name22nd Microoptics Conference, MOC 2017
Volume2017-November

Other

Other22nd Microoptics Conference, MOC 2017
CountryJapan
CityTokyo
Period11/19/1711/22/17

Fingerprint

Silicon
Electrooptical effects
Modulators
electro-optics
modulators
Polymers
Waveguides
waveguides
low voltage
Optical interconnects
Light modulators
polymers
Electric potential
silicon
optical interconnects
Electrodes
chips
high speed
electrodes

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Inoue, Y., Miura, H., & Yokoyama, S. (2017). Hybrid ultra thin silicon and electro-optic polymer waveguide modulator. In 22nd Microoptics Conference, MOC 2017 (pp. 302-303). (22nd Microoptics Conference, MOC 2017; Vol. 2017-November). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/MOC.2017.8244606

Hybrid ultra thin silicon and electro-optic polymer waveguide modulator. / Inoue, Yukinori; Miura, Hiroki; Yokoyama, Shiyoshi.

22nd Microoptics Conference, MOC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 302-303 (22nd Microoptics Conference, MOC 2017; Vol. 2017-November).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Inoue, Y, Miura, H & Yokoyama, S 2017, Hybrid ultra thin silicon and electro-optic polymer waveguide modulator. in 22nd Microoptics Conference, MOC 2017. 22nd Microoptics Conference, MOC 2017, vol. 2017-November, Institute of Electrical and Electronics Engineers Inc., pp. 302-303, 22nd Microoptics Conference, MOC 2017, Tokyo, Japan, 11/19/17. https://doi.org/10.23919/MOC.2017.8244606
Inoue Y, Miura H, Yokoyama S. Hybrid ultra thin silicon and electro-optic polymer waveguide modulator. In 22nd Microoptics Conference, MOC 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 302-303. (22nd Microoptics Conference, MOC 2017). https://doi.org/10.23919/MOC.2017.8244606
Inoue, Yukinori ; Miura, Hiroki ; Yokoyama, Shiyoshi. / Hybrid ultra thin silicon and electro-optic polymer waveguide modulator. 22nd Microoptics Conference, MOC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 302-303 (22nd Microoptics Conference, MOC 2017).
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