Hybrid ultra thin silicon and electro-optic polymer waveguide modulator

Yukinori Inoue; Hiroki Miura; Shiyoshi Yokoyama

doi:10.23919/MOC.2017.8244606

Hybrid ultra thin silicon and electro-optic polymer waveguide modulator

Yukinori Inoue, Hiroki Miura, Shiyoshi Yokoyama

Department of Advanced Device Materials

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.

Original language	English
Title of host publication	22nd Microoptics Conference, MOC 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	302-303
Number of pages	2
ISBN (Electronic)	9784863486096
DOIs	https://doi.org/10.23919/MOC.2017.8244606
Publication status	Published - Nov 19 2017
Event	22nd Microoptics Conference, MOC 2017 - Tokyo, Japan Duration: Nov 19 2017 → Nov 22 2017

Publication series

Name	22nd Microoptics Conference, MOC 2017
Volume	2017-November

Other

Other	22nd Microoptics Conference, MOC 2017
Country	Japan
City	Tokyo
Period	11/19/17 → 11/22/17

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Access to Document

10.23919/MOC.2017.8244606

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Cite this

Hybrid ultra thin silicon and electro-optic polymer waveguide modulator. / Inoue, Yukinori; Miura, Hiroki; Yokoyama, Shiyoshi.

22nd Microoptics Conference, MOC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 302-303 (22nd Microoptics Conference, MOC 2017; Vol. 2017-November).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Inoue, Y, Miura, H & Yokoyama, S 2017, Hybrid ultra thin silicon and electro-optic polymer waveguide modulator. in 22nd Microoptics Conference, MOC 2017. 22nd Microoptics Conference, MOC 2017, vol. 2017-November, Institute of Electrical and Electronics Engineers Inc., pp. 302-303, 22nd Microoptics Conference, MOC 2017, Tokyo, Japan, 11/19/17. https://doi.org/10.23919/MOC.2017.8244606

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abstract = "Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.",

author = "Yukinori Inoue and Hiroki Miura and Shiyoshi Yokoyama",

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