Hydride vapor phase epitaxy of AlN: Thermodynamic analysis of aluminum source and its application to growth

Y. Kumagai, T. Yamane, T. Miyaji, H. Murakami, Y. Kangawa, A. Koukitu

Research output: Contribution to journalConference articlepeer-review

76 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Hydride vapor phase epitaxy of AlN: Thermodynamic analysis of aluminum source and its application to growth'. Together they form a unique fingerprint.

Material Science