Hydrogenated amorphous carbon film used as an alignment layer for liquid crystal displays

Yoshimine Kato, Y. Nakagawa, Y. Saitoh, H. Satoh, S. Odahara, M. Hasegawa, P. Chaudhari, J. Doyle, S. A. Lien, A. Callegari, J. Ritsko, M. Samant, J. Stohr

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

A hydrogenated amorphous carbon (a-C:H) film has been successfully applied as an alignment layer for liquid crystal displays (LCDs) using linearly polarized UV and atomic beam (AB) alignment processes. An a-C:H film was deposited by chemical vapor deposition (CVD) or reactive DC sputtering on indium tin oxide (ITO) transparent electrodes on LCD glass. The deposition conditions for the a-C:H films, such as total pressure, power, electrode gap, and gas mixture ratio were carefully studied and optimized. Alignment of liquid crystals was also created by exposing the substrate to 257 nm polarized UV light and the directional bombardment of an Ar ion beam onto the a-C:H film. By using this non-contact alignment method, high quality large area LCD panels were successfully fabricated. The resulting LCDs showed higher quality front-of-screen characteristics than those obtained by the conventional thick polymer rubbing method particularly with respect to the lack of the rubbing tracks.

Original languageEnglish
Pages (from-to)525-528
Number of pages4
JournalSID Conference Record of the International Display Research Conference
Publication statusPublished - Jan 1 2002
Event22nd International Display Research Conference - Nice, France
Duration: Oct 2 2002Oct 4 2002

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Carbon films
Amorphous carbon
Amorphous films
Liquid crystal displays
Atomic beams
Electrodes
Tin oxides
Gas mixtures
Ultraviolet radiation
Liquid crystals
Indium
Ion beams
Sputtering
Chemical vapor deposition
Glass
Polymers
Substrates

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Hydrogenated amorphous carbon film used as an alignment layer for liquid crystal displays. / Kato, Yoshimine; Nakagawa, Y.; Saitoh, Y.; Satoh, H.; Odahara, S.; Hasegawa, M.; Chaudhari, P.; Doyle, J.; Lien, S. A.; Callegari, A.; Ritsko, J.; Samant, M.; Stohr, J.

In: SID Conference Record of the International Display Research Conference, 01.01.2002, p. 525-528.

Research output: Contribution to journalConference article

Kato, Y, Nakagawa, Y, Saitoh, Y, Satoh, H, Odahara, S, Hasegawa, M, Chaudhari, P, Doyle, J, Lien, SA, Callegari, A, Ritsko, J, Samant, M & Stohr, J 2002, 'Hydrogenated amorphous carbon film used as an alignment layer for liquid crystal displays', SID Conference Record of the International Display Research Conference, pp. 525-528.
Kato, Yoshimine ; Nakagawa, Y. ; Saitoh, Y. ; Satoh, H. ; Odahara, S. ; Hasegawa, M. ; Chaudhari, P. ; Doyle, J. ; Lien, S. A. ; Callegari, A. ; Ritsko, J. ; Samant, M. ; Stohr, J. / Hydrogenated amorphous carbon film used as an alignment layer for liquid crystal displays. In: SID Conference Record of the International Display Research Conference. 2002 ; pp. 525-528.
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abstract = "A hydrogenated amorphous carbon (a-C:H) film has been successfully applied as an alignment layer for liquid crystal displays (LCDs) using linearly polarized UV and atomic beam (AB) alignment processes. An a-C:H film was deposited by chemical vapor deposition (CVD) or reactive DC sputtering on indium tin oxide (ITO) transparent electrodes on LCD glass. The deposition conditions for the a-C:H films, such as total pressure, power, electrode gap, and gas mixture ratio were carefully studied and optimized. Alignment of liquid crystals was also created by exposing the substrate to 257 nm polarized UV light and the directional bombardment of an Ar ion beam onto the a-C:H film. By using this non-contact alignment method, high quality large area LCD panels were successfully fabricated. The resulting LCDs showed higher quality front-of-screen characteristics than those obtained by the conventional thick polymer rubbing method particularly with respect to the lack of the rubbing tracks.",
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AU - Saitoh, Y.

AU - Satoh, H.

AU - Odahara, S.

AU - Hasegawa, M.

AU - Chaudhari, P.

AU - Doyle, J.

AU - Lien, S. A.

AU - Callegari, A.

AU - Ritsko, J.

AU - Samant, M.

AU - Stohr, J.

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AB - A hydrogenated amorphous carbon (a-C:H) film has been successfully applied as an alignment layer for liquid crystal displays (LCDs) using linearly polarized UV and atomic beam (AB) alignment processes. An a-C:H film was deposited by chemical vapor deposition (CVD) or reactive DC sputtering on indium tin oxide (ITO) transparent electrodes on LCD glass. The deposition conditions for the a-C:H films, such as total pressure, power, electrode gap, and gas mixture ratio were carefully studied and optimized. Alignment of liquid crystals was also created by exposing the substrate to 257 nm polarized UV light and the directional bombardment of an Ar ion beam onto the a-C:H film. By using this non-contact alignment method, high quality large area LCD panels were successfully fabricated. The resulting LCDs showed higher quality front-of-screen characteristics than those obtained by the conventional thick polymer rubbing method particularly with respect to the lack of the rubbing tracks.

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