TY - JOUR
T1 - Imaging diagnostics of debris from laser-produced tin plasma with droplet target for EUV light source
AU - Nakamura, Daisuke
AU - Akiyama, Tomoya
AU - Takahashi, Akihiko
AU - Okada, Tatsuo
N1 - Funding Information:
The authors would like to thank Mr. Koji Tamaru for his help in the experiments. A part of this work was performed under the contract subject "Leading Project for EUV lithography source development" and the auspices of MEXT (Ministry of Education, Culture, Science and Technology, Japan) and was supported by a Grant-in-Aid for Scientific Research No. 20760025 from MEXT.
Publisher Copyright:
© 2008 Japan Laser Processing Society.
PY - 2007/12/1
Y1 - 2007/12/1
N2 - The dynamics of debris from laser-produced tin (Sn) plasma was investigated for a practical ex-treme ultraviolet (EUV) lithography source. The kinetic behaviors of the Sn atoms and of the dense particles from Sn droplet target irradiated by double pulses from the Nd:YAG laser and the CO2 la-ser were also investigated by the laser-induced fluorescence imaging method and a high-speed im-aging, respectively. After the pre-pulse irradiation of the Nd:YAG laser, the Sn atoms were ejected in all direction from the target with a speed of as fast as 20 km/s and the dense particle cloud ex-panded by a reaction force due to the plasma expansion with a speed of approximately 500 m/s. The expanding target was subsequently irradiated by the main-pulse of CO2 laser and the dense cloud was almost disappeared by main-pulse irradiation.
AB - The dynamics of debris from laser-produced tin (Sn) plasma was investigated for a practical ex-treme ultraviolet (EUV) lithography source. The kinetic behaviors of the Sn atoms and of the dense particles from Sn droplet target irradiated by double pulses from the Nd:YAG laser and the CO2 la-ser were also investigated by the laser-induced fluorescence imaging method and a high-speed im-aging, respectively. After the pre-pulse irradiation of the Nd:YAG laser, the Sn atoms were ejected in all direction from the target with a speed of as fast as 20 km/s and the dense particle cloud ex-panded by a reaction force due to the plasma expansion with a speed of approximately 500 m/s. The expanding target was subsequently irradiated by the main-pulse of CO2 laser and the dense cloud was almost disappeared by main-pulse irradiation.
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U2 - 10.2961/jlmn.2008.03.0012
DO - 10.2961/jlmn.2008.03.0012
M3 - Article
AN - SCOPUS:84891314899
SN - 1880-0688
VL - 3
SP - 196
EP - 200
JO - Journal of Laser Micro Nanoengineering
JF - Journal of Laser Micro Nanoengineering
IS - 3
ER -