Impact of a high pressure micro jet (HPMJ) on the conditioning and cleaning of unwoven fabric polyester pads in silicon polishing

Keiji Miyachi, Yoshiyuki Seike, Shinichi Haba, Syuhei Kurokawa, Toshiro K. Doi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

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Engineering