Impact of reflow on the output characteristics of piezoelectric microelectromechanical system devices

Hirofumi Nogami, Takeshi Kobayashi, Hironao Okada, Takashi Masuda, Ryutaro Maeda, Toshihiro Itoh

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science