TY - JOUR
T1 - Impact of surface morphologies of substrates on the epitaxial growth of magnetron-sputtered (ZnO) x(InN)1-xfilms
AU - Narishige, Ryota
AU - Kaneshima, Kentaro
AU - Yamashita, Daisuke
AU - Kamataki, Kunihiro
AU - Koga, Kazunori
AU - Shiratani, Masaharu
AU - Itagaki, Naho
N1 - Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2021/1
Y1 - 2021/1
N2 - The effects of substrates on the growth of sputter-deposited (ZnO) x (InN)1-x (called "ZION"hereinafter) films have been investigated. We defined the figure of merit (FOM) of ZION films as the reciprocal of the product of full width at half maximum of X-ray rocking curves and root mean square (RMS) roughness. No clear correlation between the FOM and the RMS roughness of the substrates is observed; however, interestingly, a strong correlation between the FOM and the "skewness"of the surface height distribution of the substrates is observed. A possible reason for this is that the existence of a small portion of spikes on the surface, which appear as tiny tails in the distribution but are not reflected in the RMS roughness, limits the migration of adatoms and/or leads to secondary nucleation, degrading the quality of the subsequently grown ZION films. In addition, an atomically flat single-crystalline ZION film is grown on a ZnO template with a small skewness of 0.04.
AB - The effects of substrates on the growth of sputter-deposited (ZnO) x (InN)1-x (called "ZION"hereinafter) films have been investigated. We defined the figure of merit (FOM) of ZION films as the reciprocal of the product of full width at half maximum of X-ray rocking curves and root mean square (RMS) roughness. No clear correlation between the FOM and the RMS roughness of the substrates is observed; however, interestingly, a strong correlation between the FOM and the "skewness"of the surface height distribution of the substrates is observed. A possible reason for this is that the existence of a small portion of spikes on the surface, which appear as tiny tails in the distribution but are not reflected in the RMS roughness, limits the migration of adatoms and/or leads to secondary nucleation, degrading the quality of the subsequently grown ZION films. In addition, an atomically flat single-crystalline ZION film is grown on a ZnO template with a small skewness of 0.04.
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U2 - 10.35848/1347-4065/abba0c
DO - 10.35848/1347-4065/abba0c
M3 - Article
AN - SCOPUS:85095111416
VL - 60
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
SN - 0021-4922
M1 - SAAB02
ER -