Impact of underwater laser annealing on polycrystalline silicon thin-film transistor for inactivation of electrical defects at super low temperature

Emi Machida, Masahiro Horita, Koji Yamasaki, Yasuaki Ishikawa, Yukiharu Uraoka, Hiroshi Ikenoue

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We propose underwater laser annealing (WLA) for the inactivation of electrical defects in polycrystalline silicon thin-film transistors (poly-Si TFTs) at super low-temperature. This technique can reduce the temperature of inactivation process drastically, and it requires only UV laser and deionized water. We performed WLA after the fabrication of top-gate type poly-Si TFTs. After WLA, the field-effect mobility of poly-Si TFTs increased from 52 to 72 cm{2}/{\hbox{V}}\cdot{\hbox{sec}}. The TFT surface was exposed to water vapor which was generated by laser irradiation, resulting that electrical defects were inactivated by active species in water vapor.

Original languageEnglish
Article number6422329
Pages (from-to)741-746
Number of pages6
JournalIEEE/OSA Journal of Display Technology
Volume9
Issue number9
DOIs
Publication statusPublished - Feb 1 2013

Fingerprint

laser annealing
Thin film transistors
Polysilicon
deactivation
transistors
Steam
Annealing
Water vapor
Defects
water vapor
Lasers
defects
silicon
thin films
Deionized water
Laser beam effects
ultraviolet lasers
Temperature
Fabrication
fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Impact of underwater laser annealing on polycrystalline silicon thin-film transistor for inactivation of electrical defects at super low temperature. / Machida, Emi; Horita, Masahiro; Yamasaki, Koji; Ishikawa, Yasuaki; Uraoka, Yukiharu; Ikenoue, Hiroshi.

In: IEEE/OSA Journal of Display Technology, Vol. 9, No. 9, 6422329, 01.02.2013, p. 741-746.

Research output: Contribution to journalArticle

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AU - Ikenoue, Hiroshi

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