Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

Kunihiro Kamataki; Hiroshi Miyata; Kazunori Koga; Giichiro Uchida; Naho Itagaki; Masaharu Shiratani

doi:10.1143/APEX.4.105001

Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

Kunihiro Kamataki, Hiroshi Miyata, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Masaharu Shiratani

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

We have investigated the effects of plasma fluctuation on the growth of nanoparticles in capacitively-coupled rf discharges with amplitude modulation (AM). Nanoparticles grow more slowly for higher AM levels, which causes the density of nanoparticles to increase by 100% and their size to decrease by 23%. The increase in the number of radicals for nucleation and nanoparticles by AM is thought to cause a decrease in the radical flux for a nanoparticle because the rate of increase in the number of radicals is smaller than that of nanoparticles. Therefore, this causes the generation of a large amount of nanoparticles with small sizes.

Original language	English
Article number	105001
Journal	Applied Physics Express
Volume	4
Issue number	10
DOIs	https://doi.org/10.1143/APEX.4.105001
Publication status	Published - Oct 2011

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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abstract = "We have investigated the effects of plasma fluctuation on the growth of nanoparticles in capacitively-coupled rf discharges with amplitude modulation (AM). Nanoparticles grow more slowly for higher AM levels, which causes the density of nanoparticles to increase by 100% and their size to decrease by 23%. The increase in the number of radicals for nucleation and nanoparticles by AM is thought to cause a decrease in the radical flux for a nanoparticle because the rate of increase in the number of radicals is smaller than that of nanoparticles. Therefore, this causes the generation of a large amount of nanoparticles with small sizes.",

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AU - Kamataki, Kunihiro

AU - Miyata, Hiroshi

AU - Koga, Kazunori

AU - Uchida, Giichiro

AU - Itagaki, Naho

AU - Shiratani, Masaharu

PY - 2011/10

Y1 - 2011/10

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AB - We have investigated the effects of plasma fluctuation on the growth of nanoparticles in capacitively-coupled rf discharges with amplitude modulation (AM). Nanoparticles grow more slowly for higher AM levels, which causes the density of nanoparticles to increase by 100% and their size to decrease by 23%. The increase in the number of radicals for nucleation and nanoparticles by AM is thought to cause a decrease in the radical flux for a nanoparticle because the rate of increase in the number of radicals is smaller than that of nanoparticles. Therefore, this causes the generation of a large amount of nanoparticles with small sizes.

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Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

Abstract

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