Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

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We have investigated the effects of plasma fluctuation on the growth of nanoparticles in capacitively-coupled rf discharges with amplitude modulation (AM). Nanoparticles grow more slowly for higher AM levels, which causes the density of nanoparticles to increase by 100% and their size to decrease by 23%. The increase in the number of radicals for nucleation and nanoparticles by AM is thought to cause a decrease in the radical flux for a nanoparticle because the rate of increase in the number of radicals is smaller than that of nanoparticles. Therefore, this causes the generation of a large amount of nanoparticles with small sizes.

Original languageEnglish
Article number105001
JournalApplied Physics Express
Issue number10
Publication statusPublished - Oct 1 2011


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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