Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

Kunihiro Kamataki, Hiroshi Miyata, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Masaharu Shiratani

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

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Physics