Impression of high voltage pulses on substrate in pulsed laser deposition

T. Ikegami, M. Nakao, T. Ohsima, K. Ebihara, S. Aoqui

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Laser induced fluorescence (LIF) method was used to study the impression of high voltage pulses on plasma plumes in pulsed laser deposited diamondlike carbon (DLC) films. Hardness and adhesion of DLC films was improved by applying high voltage pulses synchronous with the ablating laser pulse on to the silicon substrates. The growth of DLC films was found to depend on diamond nucleation due to strong effect of nuclei on growth rate, film morphology and quality of the film. Analysis suggested that the application of high voltage pulses to the substrate affected both plasma and film properties.

Original languageEnglish
Pages (from-to)2737-2740
Number of pages4
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume19
Issue number6
DOIs
Publication statusPublished - Nov 2001
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint

Dive into the research topics of 'Impression of high voltage pulses on substrate in pulsed laser deposition'. Together they form a unique fingerprint.

Cite this