Laser induced fluorescence (LIF) method was used to study the impression of high voltage pulses on plasma plumes in pulsed laser deposited diamondlike carbon (DLC) films. Hardness and adhesion of DLC films was improved by applying high voltage pulses synchronous with the ablating laser pulse on to the silicon substrates. The growth of DLC films was found to depend on diamond nucleation due to strong effect of nuclei on growth rate, film morphology and quality of the film. Analysis suggested that the application of high voltage pulses to the substrate affected both plasma and film properties.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films|
|Publication status||Published - Nov 2001|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films