Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages153-154
Number of pages2
ISBN (Electronic)078037830X, 9780780378308
DOIs
Publication statusPublished - Jan 1 2003
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: Aug 18 2003Aug 21 2003

Publication series

Name2003 IEEE/LEOS International Conference on Optical MEMS

Other

Other2003 IEEE/LEOS International Conference on Optical MEMS
CountryUnited States
CityWaikoloa
Period8/18/038/21/03

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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