Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages153-154
Number of pages2
ISBN (Electronic)078037830X, 9780780378308
DOIs
Publication statusPublished - Jan 1 2003
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: Aug 18 2003Aug 21 2003

Publication series

Name2003 IEEE/LEOS International Conference on Optical MEMS

Other

Other2003 IEEE/LEOS International Conference on Optical MEMS
CountryUnited States
CityWaikoloa
Period8/18/038/21/03

Fingerprint

Torsional stress
Aspect ratio
Mirrors
Crystalline materials
Electrodes
Single crystals

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Sawada, R., Yamaguchi, J., Higurashi, E., Shimizu, A., Yamamoto, T., Takeuchi, N., & Uenishi, Y. (2003). Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 153-154). [1233512] (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233512

Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. / Sawada, Renshi; Yamaguchi, J.; Higurashi, E.; Shimizu, A.; Yamamoto, T.; Takeuchi, N.; Uenishi, Y.

2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 153-154 1233512 (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sawada, R, Yamaguchi, J, Higurashi, E, Shimizu, A, Yamamoto, T, Takeuchi, N & Uenishi, Y 2003, Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233512, 2003 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 153-154, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 8/18/03. https://doi.org/10.1109/OMEMS.2003.1233512
Sawada R, Yamaguchi J, Higurashi E, Shimizu A, Yamamoto T, Takeuchi N et al. Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. In 2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc. 2003. p. 153-154. 1233512. (2003 IEEE/LEOS International Conference on Optical MEMS). https://doi.org/10.1109/OMEMS.2003.1233512
Sawada, Renshi ; Yamaguchi, J. ; Higurashi, E. ; Shimizu, A. ; Yamamoto, T. ; Takeuchi, N. ; Uenishi, Y. / Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. 2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 153-154 (2003 IEEE/LEOS International Conference on Optical MEMS).
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