Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    15 Citations (Scopus)

    Abstract

    This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.

    Original languageEnglish
    Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages153-154
    Number of pages2
    ISBN (Electronic)078037830X, 9780780378308
    DOIs
    Publication statusPublished - Jan 1 2003
    Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
    Duration: Aug 18 2003Aug 21 2003

    Publication series

    Name2003 IEEE/LEOS International Conference on Optical MEMS

    Other

    Other2003 IEEE/LEOS International Conference on Optical MEMS
    Country/TerritoryUnited States
    CityWaikoloa
    Period8/18/038/21/03

    All Science Journal Classification (ASJC) codes

    • Engineering(all)

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