Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    15 Citations (Scopus)

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    Engineering & Materials Science