The present paper deals with the development of micro compound tools and their application to the micro drilling. The micro compound tool consists of a micro drill part and an electroplated part with a nominal finishing diameter of 100 μm and they are fabricated by grinding and electroplating processes. Fabricated tools are used in drilling tests with or without ultrasonic vibration. Influences of drill part geometry on burr formation and influences of diamond grit size on peeling of the electroplating layer are investigated. As the results, secondary cutting edges do not seem to have remarkable ability for reduction of burrs. And large size of diamond grit at the electroplated part of a micro compound tool with a small difference between a diameter of electroplated part and a diameter of drill part seems to be effective in preventing peeling of the electroplating layer and improving drilling performance.