Improvement of an optical fiber stylus for microstructure and surface roughness measurement

Kosuke Uchiyama, Hiroshi Murakami, Akio Katsuki, Takao Sajima, Takahiko Yamamoto, Kunitaka Fujiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In recent years, there has been an increasing demand for measuring the inner diameter of a small diameter hole, such as a TSV, having a diameter of 10 μm or less. Therefore, we have been developing a measurement system using an optical fiber as a stylus to measure microstructures with low measurement force. In this study, a method to design and manufacture an improved two-step stylus that has a small shaft diameter, which can be inserted into a small diameter hole or small groove, and a large diameter of the remaining shaft less susceptible to external influences will be discussed. Furthermore, a method to design and manufacture a two-step plus hinge stylus with a hinge that further helps improve the measurement sensitivity of the two-step stylus, in addition an L-shaped stylus that has a pointed tip and bent shaft in the middle is proposed for surface roughness measurement.

Original languageEnglish
Title of host publicationProceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020
EditorsRichard K. Leach, David Billington, C. Nisbet, D. Phillips
Publishereuspen
Pages313-316
Number of pages4
ISBN (Electronic)9780995775176
Publication statusPublished - 2020
Event20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020 - Geneva, Virtual, Austria
Duration: Jun 8 2020Jun 12 2020

Publication series

NameProceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020

Conference

Conference20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020
CountryAustria
CityGeneva, Virtual
Period6/8/206/12/20

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Mechanical Engineering

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