Improvement of laser trapping based microprobe in laser shaded condition

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve the shadow effect. As the result of increasing the trapping efficiency by 3.2 times, this high-efficient laser trapping made it possible to extend the measurable range of the vertical surface under the shadow effect.

Original languageEnglish
Pages (from-to)764-770
Number of pages7
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Volume6
Issue number6
DOIs
Publication statusPublished - Sep 25 2012
Externally publishedYes

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Lasers
Coordinate measuring machines

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Improvement of laser trapping based microprobe in laser shaded condition. / Michihata, Masaki; Takaya, Yasuhiro; Hayashi, Terutake.

In: Journal of Advanced Mechanical Design, Systems and Manufacturing, Vol. 6, No. 6, 25.09.2012, p. 764-770.

Research output: Contribution to journalArticle

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