Improvement of sensitivity of force sensor probe using quartz crystal resonator

Noriaki Hasegawa, Shinya Sakuma, Ayaka Sato, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.

Original languageEnglish
Title of host publication2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509027842
DOIs
Publication statusPublished - Jan 18 2017
Externally publishedYes
Event27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016 - Nagoya, Japan
Duration: Nov 28 2016Nov 30 2016

Publication series

Name2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016

Other

Other27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
CountryJapan
CityNagoya
Period11/28/1611/30/16

All Science Journal Classification (ASJC) codes

  • Medicine (miscellaneous)
  • Biomedical Engineering
  • Mechanical Engineering
  • Human-Computer Interaction
  • Instrumentation
  • Computer Science Applications
  • Biotechnology
  • Artificial Intelligence

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