TY - GEN
T1 - Improvement of sensitivity of force sensor probe using quartz crystal resonator
AU - Hasegawa, Noriaki
AU - Sakuma, Shinya
AU - Sato, Ayaka
AU - Arai, Fumihito
N1 - Publisher Copyright:
© 2016 IEEE.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2017/1/18
Y1 - 2017/1/18
N2 - Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.
AB - Measuring the mechanical properties of cells or tissues is important in the field of tissue engineering. However, previous force sensor probe using quartz crystal resonator (QCR) does not have enough sensitivity for measuring single cell and living membrane tissue. In this study, we present high sensitive force sensor probe using QCR. The key for improvement of resolution of QCR force sensor probe is the thickness of QCR. By using wet etching technique, we succeeded in decreasing the thickness of QCR from 41.7 to 15 μm. We evaluated the performance of fabricated QCR force sensor probe. The sensitivity and time stability were 712,888 Hz/N and 0.52 Hz, respectively. From these results, we achieved that the measurable minimum force was at 0.73 μN. Furthermore, the measurement range of the fabricated QCR force sensor probe was 0.73 μN through 50 mN.
UR - http://www.scopus.com/inward/record.url?scp=85013661424&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85013661424&partnerID=8YFLogxK
U2 - 10.1109/MHS.2016.7824175
DO - 10.1109/MHS.2016.7824175
M3 - Conference contribution
AN - SCOPUS:85013661424
T3 - 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
BT - 2016 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 27th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016
Y2 - 28 November 2016 through 30 November 2016
ER -
