We have investigated superconductive properties of nano-scale Nb wires fabricated by a simple lift-off process with magnetron sputtering. The superconductive properties of the Nb wires were remarkably improved by employing highly plasma resistant electron-beam resist ZEP520A combined with a thin Ti passivation layer. This optimized fabrication process yielded a 300-nm-wide Nb wire with the same transition temperature as that of the reference Nb film. Thereby, a highly transparent Nb/Cu junction was successfully fabricated.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)