Improvement of superconductive properties of mesoscopic Nb wires by Ti passivation layers

Kohei Ohnishi, Takashi Kimura, Yoshichika Otani

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

We have investigated superconductive properties of nano-scale Nb wires fabricated by a simple lift-off process with magnetron sputtering. The superconductive properties of the Nb wires were remarkably improved by employing highly plasma resistant electron-beam resist ZEP520A combined with a thin Ti passivation layer. This optimized fabrication process yielded a 300-nm-wide Nb wire with the same transition temperature as that of the reference Nb film. Thereby, a highly transparent Nb/Cu junction was successfully fabricated.

Original languageEnglish
Article number021701
JournalApplied Physics Express
Volume1
Issue number2
DOIs
Publication statusPublished - Feb 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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