In situ analysis of size distribution of nano-particles in reactive plasmas using two dimensional laser light scattering method

K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida, N. Itagaki

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9 Citations (Scopus)

Abstract

We have developed a simple in-situ method for measuring the size distribution (the mean size (mean diameter) and size dispersion) of nano-particles generated in reactive plasmas using the 2 dimensional laser light scattering (2DLLS) method. The principle of the method is based on thermal coagulation of the nano-particles, which occurs after the discharge is turned off, and the size and density of the nano-particles can then be deduced. We first determined the 2D spatial distribution of the density and size of the nano-particles in smaller particle size (a few nm) range than ones deduced from the conventional 2DLLS method. From this 2D dataset, we have for the first time been able to determine the size distribution of nano-particles generated in a reactive plasma without ex-situ measurements.

Original languageEnglish
Article numberC04017
JournalJournal of Instrumentation
Volume7
Issue number4
DOIs
Publication statusPublished - Apr 2012

All Science Journal Classification (ASJC) codes

  • Mathematical Physics
  • Instrumentation

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