In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching

R. Ishikawa; S. Hirata; A. Tsurumaki-Fukuchi; M. Arita; Y. Takahashi; M. Kudo; S. Matsumura

doi:10.1149/08010.0903ecst

In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching

R. Ishikawa, S. Hirata, A. Tsurumaki-Fukuchi, M. Arita, Y. Takahashi, M. Kudo, S. Matsumura

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In-situ TEM (transmission electron microscopy) was applied to Cu/MoOx/Al2O3 bilayer CBRAM and the change of the Cu microstructure were observed during cyclic Set/Reset switching. In the Set process giving the low resistance state (LRS), a dark contrast appeared in Al2O3 layer, and in the Reset process giving the high resistance state (HRS), it almost disappeared. This result means that the resistance changed by formation and rupture of the conducting filament. In our MoOx/Al2O3 CBRAMs, cyclic Set/Reset operations were achieved with the real-time TEM observations. During the cycles, device degradation, i.e., gradual decrease in the resistance in the cyclic operation was observed in the both HRS and LRS. We confirmed that the contrast of the Cu layer and the Al2O3 layer had changed while the device degraded.

Original language	English
Title of host publication	ECS Transactions
Editors	A. P. Abbott, R. Alkire, P. Allongue, T. J. Anderson, P. N. Bartlett, M. Bayachou, S. Bhansali, N. Birbilis, A. B. Bocarsly, C. Bock, O. V. Boltalina, S. Brankovic, R. Buchheit, D. A. Buttry, S. Calabrese Barton, M. T. Carter, V. Chaitanya, G. T. Cheek, Z. Chen, D. Chidambaram, B. A. Chin, J. W. Choi, D. Chu, D. E. Cliffel, H. Deligianni, V. Di Noto, N. Dimitrov, M. Doeff, E. A. Douglas, T. Druffel, K. Edstrom, J. M. Fenton, J. Fergus, J. Fransaer, Y. Fukunaka, D. Guyomard, H. Hamada, L. M. Haverhals, P. Hesketh, A. C. Hillier, J. K. Hite, H. Imahori, M. Inaba, M. Innocenti, M. Itagaki, C. Johnson, H. Katayama, S. H. Kilgore, D. J. Kim, J. Koehne, R. Kostecki, G. Krumdick, P. J. Kulesza, J. Leddy, J. J. Lee, O. Leonte, Y. C. Lu, B. L. Lucht, R. P. Lynch, M. Manivannan, R. A. Mantz, P. Marcus, V. Maurice, M. Mauter, J. Mauzeroll, H. N. McMurray, Y. S. Meng, E. L. Miller, I. Milosev, S. D. Minteer, S. Mitra, S. Mukerjee, R. Mukundan, J. Muldoon, L. Nagahara, S. R. Narayan, P. M. Natishan, M. Navaei, J. D. Nicholas, J. Noel, S. S. Nonnenmann, C. O'Dwyer, M. E. Orazem, Y. Oren, J. G. Park, P. Pharkya, P. N. Pintauro, S. Pylypenko, K. Rajeshwar, R. P. Ramasamy, C. Rhodes, D. P. Riemer, D. Roeper, M. Rohwerder, L. Romankiw, S. V. Rotkin, J. L. M. Rupp, M. J. Sailor, D. T. Schwartz, P. K. Sekhar, N. Sharma, A. Simonian, D. K. Smith, K. C. Smith, L. Soleymani, G. R. Stafford, J. A. Staser, V. Subramanian, V. R. Subramanian, K. B. Sundaram, A. H. Suroviec, K. Suto, M. Tao, T. Tatsuma, P. C. Trulove, P. Vanysek, N. Vasiljevic, J. T. Vaughey, S. Virtanen, H. Wang, W. Wang, J. F. Whitacre, G. Williams, M. Winter, D. L. Wood, G. Wu, N. Wu, J. Xiao, Y. Xing, H. Xu, J. J. Yang, G. Zangari
Publisher	Electrochemical Society Inc.
Pages	903-910
Number of pages	8
Edition	10
ISBN (Electronic)	9781607688273
ISBN (Print)	9781623324797
DOIs	https://doi.org/10.1149/08010.0903ecst
Publication status	Published - 2017
Event	232nd ECS Meeting - National Harbor, United States Duration: Oct 1 2017 → Oct 5 2017

Publication series

Name	ECS Transactions
Number	10
Volume	80
ISSN (Print)	1938-6737
ISSN (Electronic)	1938-5862

Other

Other	232nd ECS Meeting
Country/Territory	United States
City	National Harbor
Period	10/1/17 → 10/5/17

All Science Journal Classification (ASJC) codes

Engineering(all)

Access to Document

10.1149/08010.0903ecst

Cite this

Ishikawa, R., Hirata, S., Tsurumaki-Fukuchi, A., Arita, M., Takahashi, Y., Kudo, M., & Matsumura, S. (2017). In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching. In A. P. Abbott, R. Alkire, P. Allongue, T. J. Anderson, P. N. Bartlett, M. Bayachou, S. Bhansali, N. Birbilis, A. B. Bocarsly, C. Bock, O. V. Boltalina, S. Brankovic, R. Buchheit, D. A. Buttry, S. Calabrese Barton, M. T. Carter, V. Chaitanya, G. T. Cheek, Z. Chen, D. Chidambaram, B. A. Chin, J. W. Choi, D. Chu, D. E. Cliffel, H. Deligianni, V. Di Noto, N. Dimitrov, M. Doeff, E. A. Douglas, T. Druffel, K. Edstrom, J. M. Fenton, J. Fergus, J. Fransaer, Y. Fukunaka, D. Guyomard, H. Hamada, L. M. Haverhals, P. Hesketh, A. C. Hillier, J. K. Hite, H. Imahori, M. Inaba, M. Innocenti, M. Itagaki, C. Johnson, H. Katayama, S. H. Kilgore, D. J. Kim, J. Koehne, R. Kostecki, G. Krumdick, P. J. Kulesza, J. Leddy, J. J. Lee, O. Leonte, Y. C. Lu, B. L. Lucht, R. P. Lynch, M. Manivannan, R. A. Mantz, P. Marcus, V. Maurice, M. Mauter, J. Mauzeroll, H. N. McMurray, Y. S. Meng, E. L. Miller, I. Milosev, S. D. Minteer, S. Mitra, S. Mukerjee, R. Mukundan, J. Muldoon, L. Nagahara, S. R. Narayan, P. M. Natishan, M. Navaei, J. D. Nicholas, J. Noel, S. S. Nonnenmann, C. O'Dwyer, M. E. Orazem, Y. Oren, J. G. Park, P. Pharkya, P. N. Pintauro, S. Pylypenko, K. Rajeshwar, R. P. Ramasamy, C. Rhodes, D. P. Riemer, D. Roeper, M. Rohwerder, L. Romankiw, S. V. Rotkin, J. L. M. Rupp, M. J. Sailor, D. T. Schwartz, P. K. Sekhar, N. Sharma, A. Simonian, D. K. Smith, K. C. Smith, L. Soleymani, G. R. Stafford, J. A. Staser, V. Subramanian, V. R. Subramanian, K. B. Sundaram, A. H. Suroviec, K. Suto, M. Tao, T. Tatsuma, P. C. Trulove, P. Vanysek, N. Vasiljevic, J. T. Vaughey, S. Virtanen, H. Wang, W. Wang, J. F. Whitacre, G. Williams, M. Winter, D. L. Wood, G. Wu, N. Wu, J. Xiao, Y. Xing, H. Xu, J. J. Yang, ... G. Zangari (Eds.), ECS Transactions (10 ed., pp. 903-910). (ECS Transactions; Vol. 80, No. 10). Electrochemical Society Inc.. https://doi.org/10.1149/08010.0903ecst

In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching. / Ishikawa, R.; Hirata, S.; Tsurumaki-Fukuchi, A. et al.

ECS Transactions. ed. / A. P. Abbott; R. Alkire; P. Allongue; T. J. Anderson; P. N. Bartlett; M. Bayachou; S. Bhansali; N. Birbilis; A. B. Bocarsly; C. Bock; O. V. Boltalina; S. Brankovic; R. Buchheit; D. A. Buttry; S. Calabrese Barton; M. T. Carter; V. Chaitanya; G. T. Cheek; Z. Chen; D. Chidambaram; B. A. Chin; J. W. Choi; D. Chu; D. E. Cliffel; H. Deligianni; V. Di Noto; N. Dimitrov; M. Doeff; E. A. Douglas; T. Druffel; K. Edstrom; J. M. Fenton; J. Fergus; J. Fransaer; Y. Fukunaka; D. Guyomard; H. Hamada; L. M. Haverhals; P. Hesketh; A. C. Hillier; J. K. Hite; H. Imahori; M. Inaba; M. Innocenti; M. Itagaki; C. Johnson; H. Katayama; S. H. Kilgore; D. J. Kim; J. Koehne; R. Kostecki; G. Krumdick; P. J. Kulesza; J. Leddy; J. J. Lee; O. Leonte; Y. C. Lu; B. L. Lucht; R. P. Lynch; M. Manivannan; R. A. Mantz; P. Marcus; V. Maurice; M. Mauter; J. Mauzeroll; H. N. McMurray; Y. S. Meng; E. L. Miller; I. Milosev; S. D. Minteer; S. Mitra; S. Mukerjee; R. Mukundan; J. Muldoon; L. Nagahara; S. R. Narayan; P. M. Natishan; M. Navaei; J. D. Nicholas; J. Noel; S. S. Nonnenmann; C. O'Dwyer; M. E. Orazem; Y. Oren; J. G. Park; P. Pharkya; P. N. Pintauro; S. Pylypenko; K. Rajeshwar; R. P. Ramasamy; C. Rhodes; D. P. Riemer; D. Roeper; M. Rohwerder; L. Romankiw; S. V. Rotkin; J. L. M. Rupp; M. J. Sailor; D. T. Schwartz; P. K. Sekhar; N. Sharma; A. Simonian; D. K. Smith; K. C. Smith; L. Soleymani; G. R. Stafford; J. A. Staser; V. Subramanian; V. R. Subramanian; K. B. Sundaram; A. H. Suroviec; K. Suto; M. Tao; T. Tatsuma; P. C. Trulove; P. Vanysek; N. Vasiljevic; J. T. Vaughey; S. Virtanen; H. Wang; W. Wang; J. F. Whitacre; G. Williams; M. Winter; D. L. Wood; G. Wu; N. Wu; J. Xiao; Y. Xing; H. Xu; J. J. Yang; G. Zangari. 10. ed. Electrochemical Society Inc., 2017. p. 903-910 (ECS Transactions; Vol. 80, No. 10).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ishikawa, R, Hirata, S, Tsurumaki-Fukuchi, A, Arita, M, Takahashi, Y, Kudo, M & Matsumura, S 2017, In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching. in AP Abbott, R Alkire, P Allongue, TJ Anderson, PN Bartlett, M Bayachou, S Bhansali, N Birbilis, AB Bocarsly, C Bock, OV Boltalina, S Brankovic, R Buchheit, DA Buttry, S Calabrese Barton, MT Carter, V Chaitanya, GT Cheek, Z Chen, D Chidambaram, BA Chin, JW Choi, D Chu, DE Cliffel, H Deligianni, V Di Noto, N Dimitrov, M Doeff, EA Douglas, T Druffel, K Edstrom, JM Fenton, J Fergus, J Fransaer, Y Fukunaka, D Guyomard, H Hamada, LM Haverhals, P Hesketh, AC Hillier, JK Hite, H Imahori, M Inaba, M Innocenti, M Itagaki, C Johnson, H Katayama, SH Kilgore, DJ Kim, J Koehne, R Kostecki, G Krumdick, PJ Kulesza, J Leddy, JJ Lee, O Leonte, YC Lu, BL Lucht, RP Lynch, M Manivannan, RA Mantz, P Marcus, V Maurice, M Mauter, J Mauzeroll, HN McMurray, YS Meng, EL Miller, I Milosev, SD Minteer, S Mitra, S Mukerjee, R Mukundan, J Muldoon, L Nagahara, SR Narayan, PM Natishan, M Navaei, JD Nicholas, J Noel, SS Nonnenmann, C O'Dwyer, ME Orazem, Y Oren, JG Park, P Pharkya, PN Pintauro, S Pylypenko, K Rajeshwar, RP Ramasamy, C Rhodes, DP Riemer, D Roeper, M Rohwerder, L Romankiw, SV Rotkin, JLM Rupp, MJ Sailor, DT Schwartz, PK Sekhar, N Sharma, A Simonian, DK Smith, KC Smith, L Soleymani, GR Stafford, JA Staser, V Subramanian, VR Subramanian, KB Sundaram, AH Suroviec, K Suto, M Tao, T Tatsuma, PC Trulove, P Vanysek, N Vasiljevic, JT Vaughey, S Virtanen, H Wang, W Wang, JF Whitacre, G Williams, M Winter, DL Wood, G Wu, N Wu, J Xiao, Y Xing, H Xu, JJ Yang & G Zangari (eds), ECS Transactions. 10 edn, ECS Transactions, no. 10, vol. 80, Electrochemical Society Inc., pp. 903-910, 232nd ECS Meeting, National Harbor, United States, 10/1/17. https://doi.org/10.1149/08010.0903ecst

Ishikawa R, Hirata S, Tsurumaki-Fukuchi A, Arita M, Takahashi Y, Kudo M et al. In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching. In Abbott AP, Alkire R, Allongue P, Anderson TJ, Bartlett PN, Bayachou M, Bhansali S, Birbilis N, Bocarsly AB, Bock C, Boltalina OV, Brankovic S, Buchheit R, Buttry DA, Calabrese Barton S, Carter MT, Chaitanya V, Cheek GT, Chen Z, Chidambaram D, Chin BA, Choi JW, Chu D, Cliffel DE, Deligianni H, Di Noto V, Dimitrov N, Doeff M, Douglas EA, Druffel T, Edstrom K, Fenton JM, Fergus J, Fransaer J, Fukunaka Y, Guyomard D, Hamada H, Haverhals LM, Hesketh P, Hillier AC, Hite JK, Imahori H, Inaba M, Innocenti M, Itagaki M, Johnson C, Katayama H, Kilgore SH, Kim DJ, Koehne J, Kostecki R, Krumdick G, Kulesza PJ, Leddy J, Lee JJ, Leonte O, Lu YC, Lucht BL, Lynch RP, Manivannan M, Mantz RA, Marcus P, Maurice V, Mauter M, Mauzeroll J, McMurray HN, Meng YS, Miller EL, Milosev I, Minteer SD, Mitra S, Mukerjee S, Mukundan R, Muldoon J, Nagahara L, Narayan SR, Natishan PM, Navaei M, Nicholas JD, Noel J, Nonnenmann SS, O'Dwyer C, Orazem ME, Oren Y, Park JG, Pharkya P, Pintauro PN, Pylypenko S, Rajeshwar K, Ramasamy RP, Rhodes C, Riemer DP, Roeper D, Rohwerder M, Romankiw L, Rotkin SV, Rupp JLM, Sailor MJ, Schwartz DT, Sekhar PK, Sharma N, Simonian A, Smith DK, Smith KC, Soleymani L, Stafford GR, Staser JA, Subramanian V, Subramanian VR, Sundaram KB, Suroviec AH, Suto K, Tao M, Tatsuma T, Trulove PC, Vanysek P, Vasiljevic N, Vaughey JT, Virtanen S, Wang H, Wang W, Whitacre JF, Williams G, Winter M, Wood DL, Wu G, Wu N, Xiao J, Xing Y, Xu H, Yang JJ, Zangari G, editors, ECS Transactions. 10 ed. Electrochemical Society Inc. 2017. p. 903-910. (ECS Transactions; 10). doi: 10.1149/08010.0903ecst

Ishikawa, R. ; Hirata, S. ; Tsurumaki-Fukuchi, A. et al. / In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching. ECS Transactions. editor / A. P. Abbott ; R. Alkire ; P. Allongue ; T. J. Anderson ; P. N. Bartlett ; M. Bayachou ; S. Bhansali ; N. Birbilis ; A. B. Bocarsly ; C. Bock ; O. V. Boltalina ; S. Brankovic ; R. Buchheit ; D. A. Buttry ; S. Calabrese Barton ; M. T. Carter ; V. Chaitanya ; G. T. Cheek ; Z. Chen ; D. Chidambaram ; B. A. Chin ; J. W. Choi ; D. Chu ; D. E. Cliffel ; H. Deligianni ; V. Di Noto ; N. Dimitrov ; M. Doeff ; E. A. Douglas ; T. Druffel ; K. Edstrom ; J. M. Fenton ; J. Fergus ; J. Fransaer ; Y. Fukunaka ; D. Guyomard ; H. Hamada ; L. M. Haverhals ; P. Hesketh ; A. C. Hillier ; J. K. Hite ; H. Imahori ; M. Inaba ; M. Innocenti ; M. Itagaki ; C. Johnson ; H. Katayama ; S. H. Kilgore ; D. J. Kim ; J. Koehne ; R. Kostecki ; G. Krumdick ; P. J. Kulesza ; J. Leddy ; J. J. Lee ; O. Leonte ; Y. C. Lu ; B. L. Lucht ; R. P. Lynch ; M. Manivannan ; R. A. Mantz ; P. Marcus ; V. Maurice ; M. Mauter ; J. Mauzeroll ; H. N. McMurray ; Y. S. Meng ; E. L. Miller ; I. Milosev ; S. D. Minteer ; S. Mitra ; S. Mukerjee ; R. Mukundan ; J. Muldoon ; L. Nagahara ; S. R. Narayan ; P. M. Natishan ; M. Navaei ; J. D. Nicholas ; J. Noel ; S. S. Nonnenmann ; C. O'Dwyer ; M. E. Orazem ; Y. Oren ; J. G. Park ; P. Pharkya ; P. N. Pintauro ; S. Pylypenko ; K. Rajeshwar ; R. P. Ramasamy ; C. Rhodes ; D. P. Riemer ; D. Roeper ; M. Rohwerder ; L. Romankiw ; S. V. Rotkin ; J. L. M. Rupp ; M. J. Sailor ; D. T. Schwartz ; P. K. Sekhar ; N. Sharma ; A. Simonian ; D. K. Smith ; K. C. Smith ; L. Soleymani ; G. R. Stafford ; J. A. Staser ; V. Subramanian ; V. R. Subramanian ; K. B. Sundaram ; A. H. Suroviec ; K. Suto ; M. Tao ; T. Tatsuma ; P. C. Trulove ; P. Vanysek ; N. Vasiljevic ; J. T. Vaughey ; S. Virtanen ; H. Wang ; W. Wang ; J. F. Whitacre ; G. Williams ; M. Winter ; D. L. Wood ; G. Wu ; N. Wu ; J. Xiao ; Y. Xing ; H. Xu ; J. J. Yang ; G. Zangari. 10. ed. Electrochemical Society Inc., 2017. pp. 903-910 (ECS Transactions; 10).

@inproceedings{c679ba99e07e42e6944f582565916866,

title = "In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching",

abstract = "In-situ TEM (transmission electron microscopy) was applied to Cu/MoOx/Al2O3 bilayer CBRAM and the change of the Cu microstructure were observed during cyclic Set/Reset switching. In the Set process giving the low resistance state (LRS), a dark contrast appeared in Al2O3 layer, and in the Reset process giving the high resistance state (HRS), it almost disappeared. This result means that the resistance changed by formation and rupture of the conducting filament. In our MoOx/Al2O3 CBRAMs, cyclic Set/Reset operations were achieved with the real-time TEM observations. During the cycles, device degradation, i.e., gradual decrease in the resistance in the cyclic operation was observed in the both HRS and LRS. We confirmed that the contrast of the Cu layer and the Al2O3 layer had changed while the device degraded.",

author = "R. Ishikawa and S. Hirata and A. Tsurumaki-Fukuchi and M. Arita and Y. Takahashi and M. Kudo and S. Matsumura",

note = "Funding Information: This work is supported by JSPS KAKENHI (15H01706, 16H0433906 and 16K18073) and Nanotechnology Platform Program (Hokkaido Univ. and Kyushu Univ.) organized by MEXT Japan. Publisher Copyright: {\textcopyright} The Electrochemical Society.; 232nd ECS Meeting ; Conference date: 01-10-2017 Through 05-10-2017",

year = "2017",

doi = "10.1149/08010.0903ecst",

language = "English",

isbn = "9781623324797",

series = "ECS Transactions",

publisher = "Electrochemical Society Inc.",

number = "10",

pages = "903--910",

editor = "Abbott, {A. P.} and R. Alkire and P. Allongue and Anderson, {T. J.} and Bartlett, {P. N.} and M. Bayachou and S. Bhansali and N. Birbilis and Bocarsly, {A. B.} and C. Bock and Boltalina, {O. V.} and S. Brankovic and R. Buchheit and Buttry, {D. A.} and {Calabrese Barton}, S. and Carter, {M. T.} and V. Chaitanya and Cheek, {G. T.} and Z. Chen and D. Chidambaram and Chin, {B. A.} and Choi, {J. W.} and D. Chu and Cliffel, {D. E.} and H. Deligianni and {Di Noto}, V. and N. Dimitrov and M. Doeff and Douglas, {E. A.} and T. Druffel and K. Edstrom and Fenton, {J. M.} and J. Fergus and J. Fransaer and Y. Fukunaka and D. Guyomard and H. Hamada and Haverhals, {L. M.} and P. Hesketh and Hillier, {A. C.} and Hite, {J. K.} and H. Imahori and M. Inaba and M. Innocenti and M. Itagaki and C. Johnson and H. Katayama and Kilgore, {S. H.} and Kim, {D. J.} and J. Koehne and R. Kostecki and G. Krumdick and Kulesza, {P. J.} and J. Leddy and Lee, {J. J.} and O. Leonte and Lu, {Y. C.} and Lucht, {B. L.} and Lynch, {R. P.} and M. Manivannan and Mantz, {R. A.} and P. Marcus and V. Maurice and M. Mauter and J. Mauzeroll and McMurray, {H. N.} and Meng, {Y. S.} and Miller, {E. L.} and I. Milosev and Minteer, {S. D.} and S. Mitra and S. Mukerjee and R. Mukundan and J. Muldoon and L. Nagahara and Narayan, {S. R.} and Natishan, {P. M.} and M. Navaei and Nicholas, {J. D.} and J. Noel and Nonnenmann, {S. S.} and C. O'Dwyer and Orazem, {M. E.} and Y. Oren and Park, {J. G.} and P. Pharkya and Pintauro, {P. N.} and S. Pylypenko and K. Rajeshwar and Ramasamy, {R. P.} and C. Rhodes and Riemer, {D. P.} and D. Roeper and M. Rohwerder and L. Romankiw and Rotkin, {S. V.} and Rupp, {J. L. M.} and Sailor, {M. J.} and Schwartz, {D. T.} and Sekhar, {P. K.} and N. Sharma and A. Simonian and Smith, {D. K.} and Smith, {K. C.} and L. Soleymani and Stafford, {G. R.} and Staser, {J. A.} and V. Subramanian and Subramanian, {V. R.} and Sundaram, {K. B.} and Suroviec, {A. H.} and K. Suto and M. Tao and T. Tatsuma and Trulove, {P. C.} and P. Vanysek and N. Vasiljevic and Vaughey, {J. T.} and S. Virtanen and H. Wang and W. Wang and Whitacre, {J. F.} and G. Williams and M. Winter and Wood, {D. L.} and G. Wu and N. Wu and J. Xiao and Y. Xing and H. Xu and Yang, {J. J.} and G. Zangari",

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TY - GEN

T1 - In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching

AU - Ishikawa, R.

AU - Hirata, S.

AU - Tsurumaki-Fukuchi, A.

AU - Arita, M.

AU - Takahashi, Y.

AU - Kudo, M.

AU - Matsumura, S.

N1 - Funding Information: This work is supported by JSPS KAKENHI (15H01706, 16H0433906 and 16K18073) and Nanotechnology Platform Program (Hokkaido Univ. and Kyushu Univ.) organized by MEXT Japan. Publisher Copyright: © The Electrochemical Society.

PY - 2017

Y1 - 2017

N2 - In-situ TEM (transmission electron microscopy) was applied to Cu/MoOx/Al2O3 bilayer CBRAM and the change of the Cu microstructure were observed during cyclic Set/Reset switching. In the Set process giving the low resistance state (LRS), a dark contrast appeared in Al2O3 layer, and in the Reset process giving the high resistance state (HRS), it almost disappeared. This result means that the resistance changed by formation and rupture of the conducting filament. In our MoOx/Al2O3 CBRAMs, cyclic Set/Reset operations were achieved with the real-time TEM observations. During the cycles, device degradation, i.e., gradual decrease in the resistance in the cyclic operation was observed in the both HRS and LRS. We confirmed that the contrast of the Cu layer and the Al2O3 layer had changed while the device degraded.

AB - In-situ TEM (transmission electron microscopy) was applied to Cu/MoOx/Al2O3 bilayer CBRAM and the change of the Cu microstructure were observed during cyclic Set/Reset switching. In the Set process giving the low resistance state (LRS), a dark contrast appeared in Al2O3 layer, and in the Reset process giving the high resistance state (HRS), it almost disappeared. This result means that the resistance changed by formation and rupture of the conducting filament. In our MoOx/Al2O3 CBRAMs, cyclic Set/Reset operations were achieved with the real-time TEM observations. During the cycles, device degradation, i.e., gradual decrease in the resistance in the cyclic operation was observed in the both HRS and LRS. We confirmed that the contrast of the Cu layer and the Al2O3 layer had changed while the device degraded.

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U2 - 10.1149/08010.0903ecst

DO - 10.1149/08010.0903ecst

M3 - Conference contribution

AN - SCOPUS:85046137996

SN - 9781623324797

T3 - ECS Transactions

SP - 903

EP - 910

BT - ECS Transactions

A2 - Abbott, A. P.

A2 - Alkire, R.

A2 - Allongue, P.

A2 - Anderson, T. J.

A2 - Bartlett, P. N.

A2 - Bayachou, M.

A2 - Bhansali, S.

A2 - Birbilis, N.

A2 - Bocarsly, A. B.

A2 - Bock, C.

A2 - Boltalina, O. V.

A2 - Brankovic, S.

A2 - Buchheit, R.

A2 - Buttry, D. A.

A2 - Calabrese Barton, S.

A2 - Carter, M. T.

A2 - Chaitanya, V.

A2 - Cheek, G. T.

A2 - Chen, Z.

A2 - Chidambaram, D.

A2 - Chin, B. A.

A2 - Choi, J. W.

A2 - Chu, D.

A2 - Cliffel, D. E.

A2 - Deligianni, H.

A2 - Di Noto, V.

A2 - Dimitrov, N.

A2 - Doeff, M.

A2 - Douglas, E. A.

A2 - Druffel, T.

A2 - Edstrom, K.

A2 - Fenton, J. M.

A2 - Fergus, J.

A2 - Fransaer, J.

A2 - Fukunaka, Y.

A2 - Guyomard, D.

A2 - Hamada, H.

A2 - Haverhals, L. M.

A2 - Hesketh, P.

A2 - Hillier, A. C.

A2 - Hite, J. K.

A2 - Imahori, H.

A2 - Inaba, M.

A2 - Innocenti, M.

A2 - Itagaki, M.

A2 - Johnson, C.

A2 - Katayama, H.

A2 - Kilgore, S. H.

A2 - Kim, D. J.

A2 - Koehne, J.

A2 - Kostecki, R.

A2 - Krumdick, G.

A2 - Kulesza, P. J.

A2 - Leddy, J.

A2 - Lee, J. J.

A2 - Leonte, O.

A2 - Lu, Y. C.

A2 - Lucht, B. L.

A2 - Lynch, R. P.

A2 - Manivannan, M.

A2 - Mantz, R. A.

A2 - Marcus, P.

A2 - Maurice, V.

A2 - Mauter, M.

A2 - Mauzeroll, J.

A2 - McMurray, H. N.

A2 - Meng, Y. S.

A2 - Miller, E. L.

A2 - Milosev, I.

A2 - Minteer, S. D.

A2 - Mitra, S.

A2 - Mukerjee, S.

A2 - Mukundan, R.

A2 - Muldoon, J.

A2 - Nagahara, L.

A2 - Narayan, S. R.

A2 - Natishan, P. M.

A2 - Navaei, M.

A2 - Nicholas, J. D.

A2 - Noel, J.

A2 - Nonnenmann, S. S.

A2 - O'Dwyer, C.

A2 - Orazem, M. E.

A2 - Oren, Y.

A2 - Park, J. G.

A2 - Pharkya, P.

A2 - Pintauro, P. N.

A2 - Pylypenko, S.

A2 - Rajeshwar, K.

A2 - Ramasamy, R. P.

A2 - Rhodes, C.

A2 - Riemer, D. P.

A2 - Roeper, D.

A2 - Rohwerder, M.

A2 - Romankiw, L.

A2 - Rotkin, S. V.

A2 - Rupp, J. L. M.

A2 - Sailor, M. J.

A2 - Schwartz, D. T.

A2 - Sekhar, P. K.

A2 - Sharma, N.

A2 - Simonian, A.

A2 - Smith, D. K.

A2 - Smith, K. C.

A2 - Soleymani, L.

A2 - Stafford, G. R.

A2 - Staser, J. A.

A2 - Subramanian, V.

A2 - Subramanian, V. R.

A2 - Sundaram, K. B.

A2 - Suroviec, A. H.

A2 - Suto, K.

A2 - Tao, M.

A2 - Tatsuma, T.

A2 - Trulove, P. C.

A2 - Vanysek, P.

A2 - Vasiljevic, N.

A2 - Vaughey, J. T.

A2 - Virtanen, S.

A2 - Wang, H.

A2 - Wang, W.

A2 - Whitacre, J. F.

A2 - Williams, G.

A2 - Winter, M.

A2 - Wood, D. L.

A2 - Wu, G.

A2 - Wu, N.

A2 - Xiao, J.

A2 - Xing, Y.

A2 - Xu, H.

A2 - Yang, J. J.

A2 - Zangari, G.

PB - Electrochemical Society Inc.

T2 - 232nd ECS Meeting

Y2 - 1 October 2017 through 5 October 2017

ER -

In-situ electron microscopy of cu movement in MoOx/Al2O3 bilayer CBRAM during cyclic switching

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