In situ FT-IR reflective absorption spectroscopy for characterization of SiO 2 thin films deposited using sputtering-type electron cyclotron resonance microwave plasma

Katsuhiko Furukawa, Yichun Liu, Dawei Gao, Hiroshi Nakashima, Kiichiro Uchino, Katsunori Muraoka

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Plasma conditions for depositing high quality SiO 2 thin films using a sputtering-type ECR (electron cyclotron resonance) method have been investigated. Film properties have been studied as a function of an oxygen flow rate, F O2 , in the range 2-8 sccm with a constant Ar flow rate of 16 sccm. Dielectric breakdown characteristics have been investigated by ramp I-V measurements, indicating that the film prepared with F O2 = 8 sccm to the thickness of 412 Å have a good dielectric breakdown field of 8-10 MV/cm. The deposited films were characterized in terms of refractive index and IR (infra-red) properties using FT-IRRAS (Fourier transform infrared reflective absorption spectroscopy) and ellipsometry. The refractive index of films deposited with more than F O2 = 3 sccm is close to 1.46 which indicates that the films prepared in this range are approximately stoichiometric. In addition, quantitative analysis of the dominant IR (infra-red) mode shows that the peak frequency and FWHM (full width at half-maximum) of a TO (transverse optical phonon) mode for films prepared with more than F O2 = 6 sccm are comparable with thermally grown SiO 2 , i.e. v = 1075 cm -1 and FWHM = 70 cm -1 . These observations indicate the optimum operating condition of the sputtering-type ECR apparatus, at which it can produce high quality films for MOS (metal-oxide semiconductor) device manufacture without the need for substrate heating.

Original languageEnglish
Pages (from-to)228-232
Number of pages5
JournalApplied Surface Science
Volume121-122
DOIs
Publication statusPublished - Nov 1997

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'In situ FT-IR reflective absorption spectroscopy for characterization of SiO <sub>2</sub> thin films deposited using sputtering-type electron cyclotron resonance microwave plasma'. Together they form a unique fingerprint.

Cite this