In-situ heating observation for formation behavior of polycrystalline silicon thin films fabricated using aluminum induced crystallization

Ken Ichi Ikeda, Takeshi Hirota, Kensuke Fujimoto, Youhei Sugimoto, Naoki Takata, Seiichiro Ii, Hideharu Nakashima, Hiroshi Nakashima

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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