In-situ heating observation for formation behavior of polycrystalline silicon thin films fabricated using aluminum induced crystallization

Ken Ichi Ikeda, Takeshi Hirota, Kensuke Fujimoto, Youhei Sugimoto, Naoki Takata, Seiichiro Ii, Hideharu Nakashima, Hiroshi Nakashima

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'In-situ heating observation for formation behavior of polycrystalline silicon thin films fabricated using aluminum induced crystallization'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy