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In-situ measurements of cluster volume fraction in silicon thin films using quartz crystal microbalances
Yeonwon Kim, Kosuke Hatozaki, Yuji Hashimoto, Hyunwoong Seo, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
8
Citations
(Scopus)