In-situ observation of SiC bulk single crystal growth by XRD system

Tomohisa Kato, Shin Ichi Nishizawa, Hirotaka Yamaguchi, Kazuo Arai

Research output: Contribution to journalArticle

Abstract

In-situ analysis for SiC bulk single crystal growth was reported using vertical X-ray diffraction (XRD) system. A furnace for SiC sublimation growth combined with the XRD system which possessed three kinds of functions including topography, rocking curve measurement and crystal growth rate monitoring was developed. These functions could contribute as a powerful tool finding the optimum growth condition by dynamic observation in the crucible. The in-situ X-ray topography succeeded to capture dynamic elongation of defects and dislocation generated in the SiC growing crystals. The in-situ rocking curve measurement revealed appearance of mosaic structure in the SiC crystal grown with high growth rate. The in-situ growth rate monitoring also succeeded very precisely using the direct X-ray beam absorption. On the base of findings and facts obtained by the in-situ observations, the importance for the SiC growth was discussed.

Original languageEnglish
Pages (from-to)49-53
Number of pages5
JournalJournal of Rare Earths
Volume24
Issue numberSUPPL.
Publication statusPublished - Mar 2006
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Geochemistry and Petrology

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