In situ polarization-sensitive laser-light-scattering method for simultaneous measurements of two-dimensional spatial size and density distributions of particles in plasmas

Masaharu Shiratani, Hiroharu Kawasaki, Tsuyoshi Fukuzawa, Yukio Watanabe

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35 Citations (Scopus)

Abstract

An in situ polarization-sensitive laser-light-scattering (PSLLS) method is developed to measure simultaneously two-dimensional spatial distributions of size and density of particles in plasmas, in order to reveal growth processes and behavior of particles over a discharge space. The system developed can view the whole discharge area of 50×200 mm2 illuminated by a sheet laser beam with a spatial resolution of 2×2×2 mm3 and a time resolution of 33 ms, and measure particles larger than 50 nm in size and greater than 106 cm-3 in density. Using the PSLLS method, it is found that particles formed in radio frequency silane plasmas initially appear principally in an annular region around the plasma/sheath boundary near the powered electrode. Moreover, larger particles tend to reside nearer to the powered electrode about 10 mm off the discharge-column axis. The region occupied by particles spreads axially toward the grounded electrode (downstream region) and also radially toward both the discharge-column axis and the discharge wall, and then particles flow out of the discharge space with a gas flow.

Original languageEnglish
Pages (from-to)603-607
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume14
Issue number2
DOIs
Publication statusPublished - Jan 1 1996

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Light scattering
density distribution
light scattering
Polarization
Plasmas
Electrodes
Lasers
polarization
Plasma sheaths
lasers
Silanes
Spatial distribution
Laser beams
Flow of gases
electrodes
plasma sheaths
silanes
gas flow
radio frequencies
spatial distribution

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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title = "In situ polarization-sensitive laser-light-scattering method for simultaneous measurements of two-dimensional spatial size and density distributions of particles in plasmas",
abstract = "An in situ polarization-sensitive laser-light-scattering (PSLLS) method is developed to measure simultaneously two-dimensional spatial distributions of size and density of particles in plasmas, in order to reveal growth processes and behavior of particles over a discharge space. The system developed can view the whole discharge area of 50×200 mm2 illuminated by a sheet laser beam with a spatial resolution of 2×2×2 mm3 and a time resolution of 33 ms, and measure particles larger than 50 nm in size and greater than 106 cm-3 in density. Using the PSLLS method, it is found that particles formed in radio frequency silane plasmas initially appear principally in an annular region around the plasma/sheath boundary near the powered electrode. Moreover, larger particles tend to reside nearer to the powered electrode about 10 mm off the discharge-column axis. The region occupied by particles spreads axially toward the grounded electrode (downstream region) and also radially toward both the discharge-column axis and the discharge wall, and then particles flow out of the discharge space with a gas flow.",
author = "Masaharu Shiratani and Hiroharu Kawasaki and Tsuyoshi Fukuzawa and Yukio Watanabe",
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T1 - In situ polarization-sensitive laser-light-scattering method for simultaneous measurements of two-dimensional spatial size and density distributions of particles in plasmas

AU - Shiratani, Masaharu

AU - Kawasaki, Hiroharu

AU - Fukuzawa, Tsuyoshi

AU - Watanabe, Yukio

PY - 1996/1/1

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N2 - An in situ polarization-sensitive laser-light-scattering (PSLLS) method is developed to measure simultaneously two-dimensional spatial distributions of size and density of particles in plasmas, in order to reveal growth processes and behavior of particles over a discharge space. The system developed can view the whole discharge area of 50×200 mm2 illuminated by a sheet laser beam with a spatial resolution of 2×2×2 mm3 and a time resolution of 33 ms, and measure particles larger than 50 nm in size and greater than 106 cm-3 in density. Using the PSLLS method, it is found that particles formed in radio frequency silane plasmas initially appear principally in an annular region around the plasma/sheath boundary near the powered electrode. Moreover, larger particles tend to reside nearer to the powered electrode about 10 mm off the discharge-column axis. The region occupied by particles spreads axially toward the grounded electrode (downstream region) and also radially toward both the discharge-column axis and the discharge wall, and then particles flow out of the discharge space with a gas flow.

AB - An in situ polarization-sensitive laser-light-scattering (PSLLS) method is developed to measure simultaneously two-dimensional spatial distributions of size and density of particles in plasmas, in order to reveal growth processes and behavior of particles over a discharge space. The system developed can view the whole discharge area of 50×200 mm2 illuminated by a sheet laser beam with a spatial resolution of 2×2×2 mm3 and a time resolution of 33 ms, and measure particles larger than 50 nm in size and greater than 106 cm-3 in density. Using the PSLLS method, it is found that particles formed in radio frequency silane plasmas initially appear principally in an annular region around the plasma/sheath boundary near the powered electrode. Moreover, larger particles tend to reside nearer to the powered electrode about 10 mm off the discharge-column axis. The region occupied by particles spreads axially toward the grounded electrode (downstream region) and also radially toward both the discharge-column axis and the discharge wall, and then particles flow out of the discharge space with a gas flow.

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