TY - JOUR
T1 - In situ simple method for measuring size and density of nanoparticles in reactive plasmas
AU - Nunomura, Shota
AU - Kita, Makoto
AU - Koga, Kazunori
AU - Shiratani, Masaharu
AU - Watanabe, Yukio
N1 - Funding Information:
This work was supported in part by ASM Japan K.K. The authors thank T. Kakeya and Y. Kitaura for the TEM measurements of our nanoparticles and A. Smets for the useful discussion. One of the authors (S.N.) acknowledges the Japan Society of the Promotion of Science (JSPS research fellowship).
PY - 2006
Y1 - 2006
N2 - A laser-light-scattering (LLS) method for measuring the size and density of nanoparticles generated in reactive plasmas has been developed. The size and density of the nanoparticles are determined from their thermal coagulation that takes place after turning off the discharge. The measurable size and density range of the LLS method is np 1013 (m-32) × dp -52 L-2 ng -1, where np, dp, L, and ng are the density, size, and diffusion length of the nanoparticles, and the density of a background gas, respectively. The method has been demonstrated by measurement of the size and density of nanoparticles formed by the radio-frequency discharge of dimethyldimethoxysilane Si (C H3) 2 (OC H3) 2 diluted with Ar. Using a simple optical setup for the LLS measurement, nanoparticles are detected down to ≈1 nm in size when they are generated at a density of ≈ 1012 cm-3. The developed method is widely applicable to other systems in which thermal coagulation takes place.
AB - A laser-light-scattering (LLS) method for measuring the size and density of nanoparticles generated in reactive plasmas has been developed. The size and density of the nanoparticles are determined from their thermal coagulation that takes place after turning off the discharge. The measurable size and density range of the LLS method is np 1013 (m-32) × dp -52 L-2 ng -1, where np, dp, L, and ng are the density, size, and diffusion length of the nanoparticles, and the density of a background gas, respectively. The method has been demonstrated by measurement of the size and density of nanoparticles formed by the radio-frequency discharge of dimethyldimethoxysilane Si (C H3) 2 (OC H3) 2 diluted with Ar. Using a simple optical setup for the LLS measurement, nanoparticles are detected down to ≈1 nm in size when they are generated at a density of ≈ 1012 cm-3. The developed method is widely applicable to other systems in which thermal coagulation takes place.
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U2 - 10.1063/1.2189951
DO - 10.1063/1.2189951
M3 - Article
AN - SCOPUS:33646740156
SN - 0021-8979
VL - 99
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 8
M1 - 083302
ER -