Abstract
In this paper, we show that the adhesivity of the carbonic film to the substrate is very much improved by modifying the surface of the carbonic film with ion beam irradiation and the deformation of the gate electrode can be minimized. As a result, highly efficient electron-emission characteristic of the gated cold cathode with nano-pillars was demonstrated.
Original language | English |
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Title of host publication | Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 188-189 |
Number of pages | 2 |
ISBN (Electronic) | 4891140402, 9784891140403 |
DOIs | |
Publication status | Published - Jan 1 2003 |
Externally published | Yes |
Event | International Microprocesses and Nanotechnology Conference, MNC 2003 - Tokyo, Japan Duration: Oct 29 2003 → Oct 31 2003 |
Other
Other | International Microprocesses and Nanotechnology Conference, MNC 2003 |
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Country | Japan |
City | Tokyo |
Period | 10/29/03 → 10/31/03 |
All Science Journal Classification (ASJC) codes
- Hardware and Architecture
- Electrical and Electronic Engineering