絶縁膜上における非晶質SiGeのインデント誘起固相成長

Translated title of the contribution: Indentation-Induced Solid-Phase Crystallization of SiGe on Insulator

都甲 薫, 佐道 泰造, 宮尾 正信

Research output: Contribution to journalArticle

Translated title of the contributionIndentation-Induced Solid-Phase Crystallization of SiGe on Insulator
Original languageJapanese
Pages (from-to)31-34
Number of pages4
Journal電気学会研究会資料. EFM, 電子材料研究会
Volume2008
Issue number24
Publication statusPublished - Sep 27 2008

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