Independent control of ion energy and flux in plasma-enhanced diamond growth

Kungen Teii

doi:10.1063/1.123263

Independent control of ion energy and flux in plasma-enhanced diamond growth

Kungen Teii

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Ion energy and flux incident upon a positively biased substrate in an inductively coupled plasma (ICP) have been analyzed during diamond growth at a pressure of 20 mTorr. An electrically floated characteristic of the ICP source allowed a shift up of the plasma potential by the biasing. For the substrate bias (V_b) above 20 V, the ion energy remained constant, while the ion flux was shown to decrease with increasing V_b. The diamond film grown with a high ion flux was composed of well-coalesced large scale islands as compared to that with a low ion flux. The results provide a way to control ion energy and flux independently and its advantage for ion-assisted diamond growth.

Original language	English
Pages (from-to)	4067-4069
Number of pages	3
Journal	Applied Physics Letters
Volume	74
Issue number	26
DOIs	https://doi.org/10.1063/1.123263
Publication status	Published - Jun 28 1999
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.123263

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AB - Ion energy and flux incident upon a positively biased substrate in an inductively coupled plasma (ICP) have been analyzed during diamond growth at a pressure of 20 mTorr. An electrically floated characteristic of the ICP source allowed a shift up of the plasma potential by the biasing. For the substrate bias (Vb) above 20 V, the ion energy remained constant, while the ion flux was shown to decrease with increasing Vb. The diamond film grown with a high ion flux was composed of well-coalesced large scale islands as compared to that with a low ion flux. The results provide a way to control ion energy and flux independently and its advantage for ion-assisted diamond growth.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Independent control of ion energy and flux in plasma-enhanced diamond growth

Abstract

All Science Journal Classification (ASJC) codes

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